Instrument status

Acronym Guarantor Status Modified on Comment
Non Operational ALD Eliáš, Marek Non Operational 22.3.2019 09:24 problem with loadlock
Non Operational SIMS Otevřel, Marek Non Operational 19.3.2019 17:16 Ongoing maintenance.
Some Issues NANOSAM Otevřel, Marek Some Issues 9.10.2018 12:19 Piezo stage motion in one axis (´X´) is limited (bad contact?); Ion gauge: only filament #2 available; filaments to be checked/replaced during next chamber opening.
Some Issues MIRA Švarc, Vojtěch Some Issues 19.10.2018 09:35 Vibrations in the lab, limited resolution, long-term solution, we´re working on it
Some Issues RAITH Dóczy, Robert Some Issues 11.12.2018 08:54 Vibrations in the lab, limited resolution, long-term solution, we´re working on it
Some Issues LYRA Šamořil, Tomáš Some Issues 7.1.2019 08:24 The problem with FIB gun vacuum. The HV and Emission buttons are not active if the gun pressure is higher than the limit.
Some Issues DWL Pálesch, Erik Some Issues 15.11.2018 17:04 Might give exposure artifacts - stripes (mainly in negative resists). Probably burned area in AOM crystal. It is possible to overcome this by using higher intensities for exposure. Service visit expected until the end of 03/2019.
Some Issues KRATOS-XPS Polčák, Josef Some Issues 10.12.2018 12:12 Leaking flexilock gate valve. Heating in Flexi not good - bar is not optimally aligned with heating manipulator, heating in SAC works fine.
Some Issues RAMAN Králová, Veronika Some Issues 6.2.2019 16:45 UV Laser failure - will be fixed till the end of March. The microscope is operational.
Some Issues RIE-CHLORINE Eliáš, Marek Some Issues 20.3.2019 09:09 mass flow controller for BCl3 is broken
Some Issues LEICACOAT-NANO Švarc, Vojtěch Some Issues 21.2.2019 18:36 Service Gauge is known issue, maintenance will be ordered
Some Issues NanoScan Králová, Veronika Some Issues 20.3.2019 09:04 Instalation of the system is not completed yet. Will be fixed during April.
Some Issues SUSS-MA8 Pálesch, Erik Some Issues 26.2.2019 16:52 WEC Head error. Use only detector 365nm in constant dose mode.
Operational WOOLLAM-VIS Nebojsa, Alois Operational 9.2.2018 16:48
Operational ZEISS-A2 Urbánek, Michal Operational 9.2.2018 17:16
Operational PECVD Eliáš, Marek Operational 18.2.2019 14:51
Operational SAW-ACCUTOM Holas, Jiří Operational 9.2.2018 17:12
Operational MPS150 Dóczy, Robert Operational 9.2.2018 17:20
Operational XERION Münz, Filip Operational 10.10.2018 16:55
Operational RIE-FLUORINE Eliáš, Marek Operational 19.3.2019 10:26
Operational RIGAKU3 Man, Ondřej Operational 4.6.2018 13:47
Operational SUSS-RCD8 Pálesch, Erik Operational 28.1.2019 09:57
Operational DIENER Eliáš, Marek Operational 9.2.2018 16:38
Operational SNOM-NANONICS Dvořák, Petr Operational 9.2.2018 17:18
Operational TERS Münz, Filip Operational 9.2.2018 16:48
Operational ICON-SPM Šulc, Dalibor Operational 15.8.2018 16:30
Operational SUMMIT Dóczy, Robert Operational 9.2.2018 17:07
Operational NANOCALC Švarc, Vojtěch Operational 24.5.2018 13:52 Nanocalc is located on the VirtualBox PC (Nanocalc-PC on the desktop) on DEKTAK computer
Operational STEMI Holas, Jiří Operational 9.2.2018 17:13
Operational LEICACOAT-STAN Man, Ondřej Operational 8.3.2019 11:08
Operational TIC3X Man, Ondřej Operational 14.1.2019 16:40
Operational SW-BEAMER Dóczy, Robert Operational 22.6.2018 08:43
Operational DRIE Eliáš, Marek Operational 21.2.2019 15:55
Operational SW-LAB Dóczy, Robert Operational 22.6.2018 08:43
Operational SW-TRACER Dóczy, Robert Operational 22.6.2018 08:43
Operational FISCHIONE-200 Holas, Jiří Operational 23.2.2018 11:55
Operational TENUPOL Holas, Jiří Operational 9.2.2018 17:17
Operational FISCHIONE-160 Holas, Jiří Operational 9.2.2018 17:15
Operational LECTROPOL Holas, Jiří Operational 9.2.2018 17:11
Operational EVAPORATOR Eliáš, Marek Operational 6.2.2019 16:38
Operational Experimental-PECVD Zajíčková, Lenka Operational 7.10.2018 12:06
Operational UHV-DEPOSITION Otevřel, Marek Operational 6.8.2018 13:27
Operational UHV-LEEM Otevřel, Marek Operational 10.9.2018 14:35
Operational UHV-LEIS Otevřel, Marek Operational 9.2.2018 17:09
Operational UHV-MBE Otevřel, Marek Operational 7.1.2019 13:08
Operational UHV-XPS Otevřel, Marek Operational 22.1.2019 13:36
Operational HELIOS Man, Ondřej Operational 25.2.2019 12:11 Worn aperture strip still in place!
Operational UHV-PREPARATION Otevřel, Marek Operational 7.1.2019 13:09 Burnt filament at the LEED system.
Operational UHV-PLD Otevřel, Marek Operational 9.2.2018 17:10
Operational UHV-SPM Otevřel, Marek Operational 3.12.2018 12:21
Operational FUMEHOOD-SOLVENTS-I Pálesch, Erik Operational 9.2.2018 16:40
Operational FISCHIONE-170 Holas, Jiří Operational 9.2.2018 17:15
Operational FUMEHOOD-SOLVENTS-II Pálesch, Erik Operational 20.3.2019 15:39
Operational FTIR Nebojsa, Alois Operational 11.10.2018 15:46
Operational CITOVAC Holas, Jiří Operational 9.2.2018 17:16
Operational VUVAS Nebojsa, Alois Operational 9.2.2018 16:49
Operational TEGRAMIN Holas, Jiří Operational 9.2.2018 17:11
Operational TITAN Man, Ondřej Operational 9.2.2018 16:52
Operational VERIOS Man, Ondřej Operational 27.11.2018 15:17
Operational PECVD-NANOFAB Eliáš, Marek Operational 19.3.2019 11:24
Operational WIRE-BONDER Dóczy, Robert Operational 9.2.2018 17:08
Operational RIGAKU9 Man, Ondřej Operational 13.9.2018 08:13
Operational NANOINDENTOR Králová, Veronika Operational 20.3.2018 14:22
Operational DICING-SAW Klusák, Radovan Operational 11.5.2018 14:42 Only for CF staff (for full-service ask Radovan Klusak)
Operational VNA-MPI Urbánek, Michal Operational 13.5.2018 21:02
Operational TFP-2 Flajšman, Lukáš Operational 24.1.2019 13:02
Operational PARYLENE Pekárek, Jan Operational 24.5.2018 11:08
Operational XEF2 Pekárek, Jan Operational 24.5.2018 11:12
Operational 3D-PRUSA MK3 Švarc, Vojtěch Operational 12.6.2018 11:10
Operational MECHANICAL-WORKSHOP Varga, Dominik Operational 27.8.2018 16:23 Only for CF staff (for full-service ask Dominik Varga)
Operational VERSALAB Fernandez Baldis, Federico Operational 8.2.2019 12:55
Operational 3D-PRUSA MK2.5 Švarc, Vojtěch Operational 7.11.2018 10:37
Operational ZEISS-Z1M Holas, Jiří Operational 9.2.2018 17:11
Operational SEE-SYSTEM Polášková, Kateřina Operational 18.7.2018 13:36 for training and more info please contact Kateřina Polášková (polaskova.katerina@mail.muni.cz)
Operational SCIA Eliáš, Marek Operational 6.8.2018 23:18
Operational FISCHIONE-TEM MILL Holas, Jiří Operational 16.5.2018 16:06
Operational KAUFMAN Gablech, Imrich Operational 26.2.2018 16:45
Operational micro-CT-L240 Kareš, Martin Operational 26.2.2018 16:52
Operational KEITHLEY-4200 Šulc, Dalibor Operational 9.2.2018 17:07
Operational TXP Holas, Jiří Operational 23.1.2019 17:24
Operational CPD-Autosamdri-815B Zita, Jiří Operational 27.2.2019 16:34
Operational LASER-DICER Šulc, Dalibor Operational 9.2.2018 16:47
Operational LAURELL Švarc, Vojtěch Operational 24.5.2018 13:50
Operational LIBS Pořízka, Pavel Operational 26.2.2018 16:52
Operational Litescope Neuman, Jan Operational 26.2.2018 16:52
Operational SUSS-WETBENCH Pálesch, Erik Operational 14.1.2019 09:50
Operational LPCVD-SiN Münz, Filip Operational 9.2.2018 16:44
Operational LAKESHORE Lišková, Zuzana Operational 9.2.2018 17:05
Operational CRYOGENIC Fernandez Baldis, Federico Operational 8.2.2019 12:55
Operational MAGNETRON Eliáš, Marek Operational 10.10.2018 16:54
Operational DEKTAK Dhankhar, Meena Operational 9.2.2018 16:39
Operational MOCVD Münz, Filip Operational 5.3.2019 09:58 Testing regime - contact guarantee for assanator training
Operational LABOTOM5 Holas, Jiří Operational 9.2.2018 17:16
Operational WOOLLAM-MIR Nebojsa, Alois Operational 9.2.2018 16:48
Operational CITOPRESS Holas, Jiří Operational 9.2.2018 17:12