CEITEC Nano Research Infrastructure
Brno University of Technology
Purkyňova 123, 612 00 Brno
Czech Republic
+420 54114 9207
nano@ceitec.vutbr.cz
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Instrument status
| Acronym | Guarantor | Status | Modified on | Comment |
|---|---|---|---|---|
ALD
|
Eliáš, Marek | Non Operational | 22.3.2019 09:24 | problem with loadlock |
|
SIMS
|
Otevřel, Marek | Non Operational | 19.3.2019 17:16 | Ongoing maintenance. |
NANOSAM
|
Otevřel, Marek | Some Issues | 9.10.2018 12:19 | Piezo stage motion in one axis (´X´) is limited (bad contact?); Ion gauge: only filament #2 available; filaments to be checked/replaced during next chamber opening. |
|
MIRA
|
Švarc, Vojtěch | Some Issues | 19.10.2018 09:35 | Vibrations in the lab, limited resolution, long-term solution, we´re working on it |
|
RAITH
|
Dóczy, Robert | Some Issues | 11.12.2018 08:54 | Vibrations in the lab, limited resolution, long-term solution, we´re working on it |
|
LYRA
|
Šamořil, Tomáš | Some Issues | 7.1.2019 08:24 | The problem with FIB gun vacuum. The HV and Emission buttons are not active if the gun pressure is higher than the limit. |
|
DWL
|
Pálesch, Erik | Some Issues | 15.11.2018 17:04 | Might give exposure artifacts - stripes (mainly in negative resists). Probably burned area in AOM crystal. It is possible to overcome this by using higher intensities for exposure. Service visit expected until the end of 03/2019. |
|
KRATOS-XPS
|
Polčák, Josef | Some Issues | 10.12.2018 12:12 | Leaking flexilock gate valve. Heating in Flexi not good - bar is not optimally aligned with heating manipulator, heating in SAC works fine. |
|
RAMAN
|
Králová, Veronika | Some Issues | 6.2.2019 16:45 | UV Laser failure - will be fixed till the end of March. The microscope is operational. |
|
RIE-CHLORINE
|
Eliáš, Marek | Some Issues | 20.3.2019 09:09 | mass flow controller for BCl3 is broken |
|
LEICACOAT-NANO
|
Švarc, Vojtěch | Some Issues | 21.2.2019 18:36 | Service Gauge is known issue, maintenance will be ordered |
|
NanoScan
|
Králová, Veronika | Some Issues | 20.3.2019 09:04 | Instalation of the system is not completed yet. Will be fixed during April. |
|
SUSS-MA8
|
Pálesch, Erik | Some Issues | 26.2.2019 16:52 | WEC Head error. Use only detector 365nm in constant dose mode. |
WOOLLAM-VIS
|
Nebojsa, Alois | Operational | 9.2.2018 16:48 | |
|
ZEISS-A2
|
Urbánek, Michal | Operational | 9.2.2018 17:16 | |
|
PECVD
|
Eliáš, Marek | Operational | 18.2.2019 14:51 | |
|
SAW-ACCUTOM
|
Holas, Jiří | Operational | 9.2.2018 17:12 | |
|
MPS150
|
Dóczy, Robert | Operational | 9.2.2018 17:20 | |
|
XERION
|
Münz, Filip | Operational | 10.10.2018 16:55 | |
|
RIE-FLUORINE
|
Eliáš, Marek | Operational | 19.3.2019 10:26 | |
|
RIGAKU3
|
Man, Ondřej | Operational | 4.6.2018 13:47 | |
|
SUSS-RCD8
|
Pálesch, Erik | Operational | 28.1.2019 09:57 | |
|
DIENER
|
Eliáš, Marek | Operational | 9.2.2018 16:38 | |
|
SNOM-NANONICS
|
Dvořák, Petr | Operational | 9.2.2018 17:18 | |
|
TERS
|
Münz, Filip | Operational | 9.2.2018 16:48 | |
|
ICON-SPM
|
Šulc, Dalibor | Operational | 15.8.2018 16:30 | |
|
SUMMIT
|
Dóczy, Robert | Operational | 9.2.2018 17:07 | |
|
NANOCALC
|
Švarc, Vojtěch | Operational | 24.5.2018 13:52 | Nanocalc is located on the VirtualBox PC (Nanocalc-PC on the desktop) on DEKTAK computer |
|
STEMI
|
Holas, Jiří | Operational | 9.2.2018 17:13 | |
|
LEICACOAT-STAN
|
Man, Ondřej | Operational | 8.3.2019 11:08 | |
|
TIC3X
|
Man, Ondřej | Operational | 14.1.2019 16:40 | |
|
SW-BEAMER
|
Dóczy, Robert | Operational | 22.6.2018 08:43 | |
|
DRIE
|
Eliáš, Marek | Operational | 21.2.2019 15:55 | |
|
SW-LAB
|
Dóczy, Robert | Operational | 22.6.2018 08:43 | |
|
SW-TRACER
|
Dóczy, Robert | Operational | 22.6.2018 08:43 | |
|
FISCHIONE-200
|
Holas, Jiří | Operational | 23.2.2018 11:55 | |
|
TENUPOL
|
Holas, Jiří | Operational | 9.2.2018 17:17 | |
|
FISCHIONE-160
|
Holas, Jiří | Operational | 9.2.2018 17:15 | |
|
LECTROPOL
|
Holas, Jiří | Operational | 9.2.2018 17:11 | |
|
EVAPORATOR
|
Eliáš, Marek | Operational | 6.2.2019 16:38 | |
|
Experimental-PECVD
|
Zajíčková, Lenka | Operational | 7.10.2018 12:06 | |
|
UHV-DEPOSITION
|
Otevřel, Marek | Operational | 6.8.2018 13:27 | |
|
UHV-LEEM
|
Otevřel, Marek | Operational | 10.9.2018 14:35 | |
|
UHV-LEIS
|
Otevřel, Marek | Operational | 9.2.2018 17:09 | |
|
UHV-MBE
|
Otevřel, Marek | Operational | 7.1.2019 13:08 | |
|
UHV-XPS
|
Otevřel, Marek | Operational | 22.1.2019 13:36 | |
|
HELIOS
|
Man, Ondřej | Operational | 25.2.2019 12:11 | Worn aperture strip still in place! |
|
UHV-PREPARATION
|
Otevřel, Marek | Operational | 7.1.2019 13:09 | Burnt filament at the LEED system. |
|
UHV-PLD
|
Otevřel, Marek | Operational | 9.2.2018 17:10 | |
|
UHV-SPM
|
Otevřel, Marek | Operational | 3.12.2018 12:21 | |
|
FUMEHOOD-SOLVENTS-I
|
Pálesch, Erik | Operational | 9.2.2018 16:40 | |
|
FISCHIONE-170
|
Holas, Jiří | Operational | 9.2.2018 17:15 | |
|
FUMEHOOD-SOLVENTS-II
|
Pálesch, Erik | Operational | 20.3.2019 15:39 | |
|
FTIR
|
Nebojsa, Alois | Operational | 11.10.2018 15:46 | |
|
CITOVAC
|
Holas, Jiří | Operational | 9.2.2018 17:16 | |
|
VUVAS
|
Nebojsa, Alois | Operational | 9.2.2018 16:49 | |
|
TEGRAMIN
|
Holas, Jiří | Operational | 9.2.2018 17:11 | |
|
TITAN
|
Man, Ondřej | Operational | 9.2.2018 16:52 | |
|
VERIOS
|
Man, Ondřej | Operational | 27.11.2018 15:17 | |
|
PECVD-NANOFAB
|
Eliáš, Marek | Operational | 19.3.2019 11:24 | |
|
WIRE-BONDER
|
Dóczy, Robert | Operational | 9.2.2018 17:08 | |
|
RIGAKU9
|
Man, Ondřej | Operational | 13.9.2018 08:13 | |
|
NANOINDENTOR
|
Králová, Veronika | Operational | 20.3.2018 14:22 | |
|
DICING-SAW
|
Klusák, Radovan | Operational | 11.5.2018 14:42 | Only for CF staff (for full-service ask Radovan Klusak) |
|
VNA-MPI
|
Urbánek, Michal | Operational | 13.5.2018 21:02 | |
|
TFP-2
|
Flajšman, Lukáš | Operational | 24.1.2019 13:02 | |
|
PARYLENE
|
Pekárek, Jan | Operational | 24.5.2018 11:08 | |
|
XEF2
|
Pekárek, Jan | Operational | 24.5.2018 11:12 | |
|
3D-PRUSA MK3
|
Švarc, Vojtěch | Operational | 12.6.2018 11:10 | |
|
MECHANICAL-WORKSHOP
|
Varga, Dominik | Operational | 27.8.2018 16:23 | Only for CF staff (for full-service ask Dominik Varga) |
|
VERSALAB
|
Fernandez Baldis, Federico | Operational | 8.2.2019 12:55 | |
|
3D-PRUSA MK2.5
|
Švarc, Vojtěch | Operational | 7.11.2018 10:37 | |
|
ZEISS-Z1M
|
Holas, Jiří | Operational | 9.2.2018 17:11 | |
|
SEE-SYSTEM
|
Polášková, Kateřina | Operational | 18.7.2018 13:36 | for training and more info please contact Kateřina Polášková (polaskova.katerina@mail.muni.cz) |
|
SCIA
|
Eliáš, Marek | Operational | 6.8.2018 23:18 | |
|
FISCHIONE-TEM MILL
|
Holas, Jiří | Operational | 16.5.2018 16:06 | |
|
KAUFMAN
|
Gablech, Imrich | Operational | 26.2.2018 16:45 | |
|
micro-CT-L240
|
Kareš, Martin | Operational | 26.2.2018 16:52 | |
|
KEITHLEY-4200
|
Šulc, Dalibor | Operational | 9.2.2018 17:07 | |
|
TXP
|
Holas, Jiří | Operational | 23.1.2019 17:24 | |
|
CPD-Autosamdri-815B
|
Zita, Jiří | Operational | 27.2.2019 16:34 | |
|
LASER-DICER
|
Šulc, Dalibor | Operational | 9.2.2018 16:47 | |
|
LAURELL
|
Švarc, Vojtěch | Operational | 24.5.2018 13:50 | |
|
LIBS
|
Pořízka, Pavel | Operational | 26.2.2018 16:52 | |
|
Litescope
|
Neuman, Jan | Operational | 26.2.2018 16:52 | |
|
SUSS-WETBENCH
|
Pálesch, Erik | Operational | 14.1.2019 09:50 | |
|
LPCVD-SiN
|
Münz, Filip | Operational | 9.2.2018 16:44 | |
|
LAKESHORE
|
Lišková, Zuzana | Operational | 9.2.2018 17:05 | |
|
CRYOGENIC
|
Fernandez Baldis, Federico | Operational | 8.2.2019 12:55 | |
|
MAGNETRON
|
Eliáš, Marek | Operational | 10.10.2018 16:54 | |
|
DEKTAK
|
Dhankhar, Meena | Operational | 9.2.2018 16:39 | |
|
MOCVD
|
Münz, Filip | Operational | 5.3.2019 09:58 | Testing regime - contact guarantee for assanator training |
|
LABOTOM5
|
Holas, Jiří | Operational | 9.2.2018 17:16 | |
|
WOOLLAM-MIR
|
Nebojsa, Alois | Operational | 9.2.2018 16:48 | |
|
CITOPRESS
|
Holas, Jiří | Operational | 9.2.2018 17:12 |