Instrument status

Non Operational Non operational  Some Issues Some issues  Operational Operational 

Acronym Guarantor Expected date of repair Modified on Comment
Non Operational PECVD Marek Eliáš, Ph.D. 30.6.2019 16:05 The ICP generator is broken.
Non Operational RIE-CHLORINE Marek Eliáš, Ph.D. 26.8.2019 11:08 the ICP generator is broken, you can use only HF power. Cleaning only by HF power.
Some Issues SUSS-RCD8 Erik Pálesch, Ph.D. Week 39 9.9.2019 11:16 Resist pump is being serviced; other functions working
Some Issues MIRA Vojtěch Švarc 26.8.2019 09:21 Virtual Beam Control Error. Vibrations in the lab, limited resolution, long-term solution, we´re working on it
Some Issues TIC3X Ondřej Man, Ph.D. Week 39 (awaiting spare parts) 27.8.2019 12:56 Rotary stage stuck. Cross sectional polishing possible using any stage.
Some Issues RAITH Meena Dhankhar 11.12.2018 08:54 Process quality limited due to vibrations in the lab. We are working on long term solution.
Some Issues FUMEHOOD-SOLVENTS-II Erik Pálesch, Ph.D. Week 39 19.8.2019 10:07 Heating in bath 1 (right hood) out of order. Heating elements will be exchanged. Ultrasound is working.
Some Issues VERIOS Ondřej Man, Ph.D. SW update scheduled for the week 37 19.8.2019 16:23 EDAX TEAM unable to start-up. EDS/EBSD/WDS jobs not possible.
Some Issues KRATOS-XPS Josef Polčák, Ph.D. 1.10.2019 6.9.2019 15:13 Reliability of flow of cooling water is getting better. However, it is recommended to check magnetic lens current if the signal is low. New flow sensor ordered, will be changed and tested.
Some Issues 3D-PRUSA MK3 Vojtěch Švarc 14.07.2019 1.8.2019 08:25 Heater wire broken, undergoing maintenance and upgrade to MK3S
Some Issues SEE-SYSTEM Kateřina Polášková During September or October 2.9.2019 11:33 The sample movement in x axis is not working. Contact: lucie.blahova@ceitec.muni.cz
Some Issues LEICACOAT-NANO Vojtěch Švarc 21.2.2019 18:36 Service Gauge is known issue, maintenance will be ordered
Some Issues NanoScan Michal Staňo 20.3.2019 09:04 Test operation after last (August) service visit. In-plane field option: no automatic magnet gap adjustment; only manual, every magnet has to be moved separately.
Some Issues SUSS-MA8 Vojtěch Švarc 26.2.2019 16:52 WEC Head error. Use only detector 365nm in constant dose mode.
Operational MIRA3_XMU Marek Zbončák, Ph.D. 6.9.2019 11:30
Operational LPCVD-polySi Filip Münz, Ph.D. 9.2.2018 16:45
Operational KERR-MICROSCOPE Lukáš Flajšman 10.9.2019 17:21
Operational NIRQUEST512 Alois Nebojsa 9.2.2018 17:06
Operational JAZ3-CHANNEL Alois Nebojsa 9.2.2018 17:06
Operational NANOSAM Marek Otevřel, Ph.D. 27.5.2019 13:31 At the moment the new filaments are doing well
Operational WOOLLAM-VIS Alois Nebojsa 9.2.2018 16:48
Operational ZEISS-A2 Michal Urbánek, Ph.D. 10.9.2019 16:44
Operational SAW-ACCUTOM Jiří Holas 9.2.2018 17:12
Operational MPS150 Jan Pekárek, Ph.D. 9.2.2018 17:20
Operational XERION Filip Münz, Ph.D. 10.10.2018 16:55
Operational RIE-FLUORINE Marek Eliáš, Ph.D. 19.3.2019 10:26
Operational ALD Marek Eliáš, Ph.D. 23.4.2019 10:18 problem with loadlock
Operational RIGAKU3 Ondřej Man, Ph.D. 16.8.2019 13:20
Operational DIENER Marek Eliáš, Ph.D. 9.2.2018 16:38
Operational SNOM-NANONICS Petr Dvořák, Ph.D. 9.2.2018 17:18
Operational TERS Filip Münz, Ph.D. 9.2.2018 16:48
Operational ICON-SPM Igor Turčan 15.8.2018 16:30
Operational SIMS Marek Otevřel, Ph.D. 1.4.2019 14:10 Ongoing maintenance.
Operational SUMMIT Jan Pekárek, Ph.D. 9.2.2018 17:07
Operational NANOCALC Vojtěch Švarc 24.5.2018 13:52 Nanocalc is located on the VirtualBox PC (Nanocalc-PC on the desktop) on DEKTAK computer
Operational STEMI Jiří Holas 9.2.2018 17:13
Operational LEICACOAT-STAN Ondřej Man, Ph.D. 17.5.2019 12:39
Operational SW-BEAMER Jakub Sadílek 22.6.2018 08:43
Operational DRIE Marek Eliáš, Ph.D. 12.6.2019 14.6.2019 13:32 problem with controlller of substrate temperature
Operational SW-LAB Jakub Sadílek 22.6.2018 08:43
Operational SW-TRACER Jakub Sadílek 22.6.2018 08:43
Operational FISCHIONE-200 Jiří Holas 23.2.2018 11:55
Operational TENUPOL Jiří Holas 9.2.2018 17:17
Operational FISCHIONE-160 Jiří Holas 9.2.2018 17:15
Operational LECTROPOL Jiří Holas 9.2.2018 17:11
Operational EVAPORATOR Marek Eliáš, Ph.D. 30.8.2019 15:57
Operational Experimental-PECVD Lenka Zajíčková, Ph.D. 10.9.2019 09:34
Operational UHV-DEPOSITION Marek Otevřel, Ph.D. 6.8.2018 13:27
Operational UHV-LEEM Marek Otevřel, Ph.D. 27.5.2019 13:31
Operational UHV-LEIS Marek Otevřel, Ph.D. 9.2.2018 17:09
Operational UHV-MBE Marek Otevřel, Ph.D. 9.9.2019 12:31
Operational UHV-XPS Marek Otevřel, Ph.D. 23.4.2019 08:50
Operational HELIOS Ondřej Man, Ph.D. 25.2.2019 12:11 Worn aperture strip still in place!
Operational UHV-PREPARATION Marek Otevřel, Ph.D. 7.1.2019 13:09 Burnt filament at the LEED system.
Operational LYRA Tomáš Šamořil, Ph.D. 12.9.2019 08:37
Operational UHV-PLD Marek Otevřel, Ph.D. 9.2.2018 17:10
Operational UHV-SPM Marek Otevřel, Ph.D. 3.12.2018 12:21
Operational FUMEHOOD-SOLVENTS-I Erik Pálesch, Ph.D. 9.2.2018 16:40
Operational FISCHIONE-170 Jiří Holas 9.2.2018 17:15
Operational DWL Erik Pálesch, Ph.D. 17.4.2019 13:42
Operational FTIR Alois Nebojsa 11.10.2018 15:46
Operational CITOVAC Jiří Holas 9.2.2018 17:16
Operational VUVAS Alois Nebojsa 22.5.2019 24.5.2019 12:20 Optics replacement complete
Operational TEGRAMIN Jiří Holas 9.2.2018 17:11
Operational TITAN Ondřej Man, Ph.D. 9.2.2018 16:52
Operational PECVD-NANOFAB Marek Eliáš, Ph.D. 19.3.2019 11:24
Operational WIRE-BONDER Marek Vaňatka 9.2.2018 17:08
Operational RIGAKU9 Ondřej Man, Ph.D. 13.9.2018 08:13
Operational NANOINDENTOR Tomáš Plichta 20.3.2018 14:22
Operational DICING-SAW Radovan Klusák 21.6.2019 15.7.2019 11:10
Operational VNA-MPI Michal Urbánek, Ph.D. 13.5.2018 21:02
Operational TFP-2 Lukáš Flajšman 24.1.2019 13:02
Operational PARYLENE Jan Pekárek, Ph.D. 18.6.2019 19.6.2019 11:20
Operational XEF2 Jan Pekárek, Ph.D. 24.5.2018 11:12
Operational MECHANICAL-WORKSHOP Dominik Varga 27.8.2018 16:23 Only for CF staff (for full-service ask Dominik Varga)
Operational VERSALAB Federico José Fernandez Baldis, Ph.D. 10.9.2019 17:13
Operational 3D-PRUSA MK2.5 Vojtěch Švarc 7.11.2018 10:37
Operational ZEISS-Z1M Jiří Holas 12.7.2019 11:29
Operational RAMAN Martin Konečný 17.6.2019 15:03 System is fully operational, UV laser installed.
Operational SCIA Marek Eliáš, Ph.D. 6.8.2018 23:18
Operational FISCHIONE-TEM MILL Jiří Holas 16.5.2018 16:06
Operational KAUFMAN Imrich Gablech, Ph.D. 26.2.2018 16:45
Operational micro-CT-L240 Martin Kareš 26.2.2018 16:52
Operational KEITHLEY-4200 Jan Pekárek, Ph.D. 9.2.2018 17:07
Operational TXP Jiří Holas 23.1.2019 17:24
Operational CPD-Autosamdri-815B Jiří Zita, Ph.D. 27.2.2019 16:34
Operational GLOVEBOX Filip Münz, Ph.D. 13.5.2019 15:57
Operational LASER-DICER Jakub Sadílek 9.2.2018 16:47
Operational LAURELL Vojtěch Švarc 15.7.2019 27.6.2019 10:10
Operational LIBS Pavel Pořízka, Ph.D. 26.2.2018 16:52
Operational Litescope Michal Urbánek, Ph.D. 10.9.2019 17:17
Operational SUSS-WETBENCH Erik Pálesch, Ph.D. 9.9.2019 11:15
Operational LPCVD-SiN Filip Münz, Ph.D. 9.2.2018 16:44
Operational LAKESHORE Federico José Fernandez Baldis, Ph.D. 9.2.2018 17:05
Operational CRYOGENIC Michal Urbánek, Ph.D. 27.8.2019 12:53
Operational MAGNETRON Marek Eliáš, Ph.D. 12.7.2019 14:17 set the temperature of substrate in manual mode.
Operational DEKTAK Meena Dhankhar 9.2.2018 16:39
Operational MOCVD Filip Münz, Ph.D. 1.3.2019 5.3.2019 09:58 Testing regime - contact guarantee for assanator training
Operational LABOTOM5 Jiří Holas 9.2.2018 17:16
Operational WOOLLAM-MIR 9.2.2018 16:48
Operational APCVD Filip Münz, Ph.D. 9.2.2018 16:44
Operational CITOPRESS Jiří Holas 9.2.2018 17:12