CEITEC Nano Research Infrastructure
Brno University of Technology
Purkyňova 123, 612 00 Brno
Czech Republic
+420 54114 9207
nano@ceitec.vutbr.cz
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Instrument status
| Acronym | Guarantor | Status | Modified on | Comment |
|---|---|---|---|---|
UHV-XPS
|
Otevřel, Marek | Non Operational | 4.1.2019 16:12 | X-ray source not operational |
|
MOCVD
|
Münz, Filip | Non Operational | 26.11.2018 09:30 | PBN Heater damaged - replacement coming January 2019 |
NANOSAM
|
Otevřel, Marek | Some Issues | 9.10.2018 12:19 | Piezo stage motion in one axis (´X´) is limited (bad contact?); Ion gauge: only filament #2 available; filaments to be checked/replaced during next chamber opening. |
|
PECVD
|
Eliáš, Marek | Some Issues | 23.11.2018 16:27 | substrate temperature only to 100 C; Heater fault. Situation is undergoing deep investigation. |
|
MIRA
|
Švarc, Vojtěch | Some Issues | 19.10.2018 09:35 | Vibrations in the lab, limited resolution, long-term solution, we´re working on it |
|
RAITH
|
Dóczy, Robert | Some Issues | 11.12.2018 08:54 | Vibrations in the lab, limited resolution, long-term solution, we´re working on it |
|
EVAPORATOR
|
Eliáš, Marek | Some Issues | 17.4.2018 11:32 | the pressure in to the chamber is OK, but the pressure gauge is broken |
|
HELIOS
|
Man, Ondřej | Some Issues | 23.11.2018 17:36 | 1) LMIS going depleted - FIB available, watch emission current & call heating when it drops close to 1,8 microamp! 2) Pt GIS becoming empty. Doublecheck deposit thickness. Crucible exchange planned for 01/2019. |
|
LYRA
|
Šamořil, Tomáš | Some Issues | 7.1.2019 08:24 | The SEM imaging in EDX SW does not work, but EDX (point, area, map) analysis works. |
|
FUMEHOOD-SOLVENTS-II
|
Pálesch, Erik | Some Issues | 13.8.2018 14:57 | US not working - new unit will be available from 15.2.2019 (might be even earlier..) |
|
DWL
|
Pálesch, Erik | Some Issues | 15.11.2018 17:04 | Might give exposure artifacts - stripes. Probably burned area in AOM crystal. It is possible to overcome this by using higher intensities for exposure. Service visit expected until the end of 02/2019. |
|
PECVD-NANOFAB
|
Eliáš, Marek | Some Issues | 2.11.2018 16:25 | loadlock not working |
|
KRATOS-XPS
|
Polčák, Josef | Some Issues | 10.12.2018 12:12 | Heating in SAC and Flexi over 500 °C not reliable. The sample holder will be sent to Kratos after finishing ´low heating´ experiments (beggining of December). Expected fixing: end of January |
|
TFP-2
|
Flajšman, Lukáš | Some Issues | 18.12.2018 15:53 | Probes not mounted. |
|
SUSS-MA8
|
Pálesch, Erik | Some Issues | 18.9.2018 00:43 | WEC Head error. Use only detector #1 in constant dose mode. |
WOOLLAM-VIS
|
Nebojsa, Alois | Operational | 9.2.2018 16:48 | |
|
ZEISS-A2
|
Urbánek, Michal | Operational | 9.2.2018 17:16 | |
|
SAW-ACCUTOM
|
Holas, Jiří | Operational | 9.2.2018 17:12 | |
|
MPS150
|
Dóczy, Robert | Operational | 9.2.2018 17:20 | |
|
XERION
|
Münz, Filip | Operational | 10.10.2018 16:55 | |
|
RIE-FLUORINE
|
Eliáš, Marek | Operational | 9.2.2018 16:44 | |
|
ALD
|
Eliáš, Marek | Operational | 2.11.2018 16:22 | |
|
RIGAKU3
|
Man, Ondřej | Operational | 4.6.2018 13:47 | |
|
SUSS-RCD8
|
Pálesch, Erik | Operational | 10.5.2018 17:14 | |
|
DIENER
|
Eliáš, Marek | Operational | 9.2.2018 16:38 | |
|
SNOM-NANONICS
|
Dvořák, Petr | Operational | 9.2.2018 17:18 | |
|
TERS
|
Münz, Filip | Operational | 9.2.2018 16:48 | |
|
ICON-SPM
|
Šulc, Dalibor | Operational | 15.8.2018 16:30 | |
|
SIMS
|
Otevřel, Marek | Operational | 9.2.2018 17:09 | |
|
SUMMIT
|
Dóczy, Robert | Operational | 9.2.2018 17:07 | |
|
NANOCALC
|
Švarc, Vojtěch | Operational | 24.5.2018 13:52 | Nanocalc is located on the VirtualBox PC (Nanocalc-PC on the desktop) on DEKTAK computer |
|
STEMI
|
Holas, Jiří | Operational | 9.2.2018 17:13 | |
|
LEICACOAT-STAN
|
Man, Ondřej | Operational | 14.1.2019 16:40 | |
|
TIC3X
|
Man, Ondřej | Operational | 14.1.2019 16:40 | |
|
SW-BEAMER
|
Dóczy, Robert | Operational | 22.6.2018 08:43 | |
|
DRIE
|
Eliáš, Marek | Operational | 1.11.2018 17:12 | |
|
SW-LAB
|
Dóczy, Robert | Operational | 22.6.2018 08:43 | |
|
SW-TRACER
|
Dóczy, Robert | Operational | 22.6.2018 08:43 | |
|
FISCHIONE-200
|
Holas, Jiří | Operational | 23.2.2018 11:55 | |
|
TENUPOL
|
Holas, Jiří | Operational | 9.2.2018 17:17 | |
|
FISCHIONE-160
|
Holas, Jiří | Operational | 9.2.2018 17:15 | |
|
LECTROPOL
|
Holas, Jiří | Operational | 9.2.2018 17:11 | |
|
Experimental-PECVD
|
Zajíčková, Lenka | Operational | 7.10.2018 12:06 | |
|
UHV-DEPOSITION
|
Otevřel, Marek | Operational | 6.8.2018 13:27 | |
|
UHV-LEEM
|
Otevřel, Marek | Operational | 10.9.2018 14:35 | |
|
UHV-LEIS
|
Otevřel, Marek | Operational | 9.2.2018 17:09 | |
|
UHV-MBE
|
Otevřel, Marek | Operational | 7.1.2019 13:08 | |
|
UHV-PREPARATION
|
Otevřel, Marek | Operational | 7.1.2019 13:09 | Burnt filament at the LEED system. |
|
UHV-PLD
|
Otevřel, Marek | Operational | 9.2.2018 17:10 | |
|
UHV-SPM
|
Otevřel, Marek | Operational | 3.12.2018 12:21 | |
|
FUMEHOOD-SOLVENTS-I
|
Pálesch, Erik | Operational | 9.2.2018 16:40 | |
|
FISCHIONE-170
|
Holas, Jiří | Operational | 9.2.2018 17:15 | |
|
FTIR
|
Nebojsa, Alois | Operational | 11.10.2018 15:46 | |
|
CITOVAC
|
Holas, Jiří | Operational | 9.2.2018 17:16 | |
|
VUVAS
|
Nebojsa, Alois | Operational | 9.2.2018 16:49 | |
|
TEGRAMIN
|
Holas, Jiří | Operational | 9.2.2018 17:11 | |
|
TITAN
|
Man, Ondřej | Operational | 9.2.2018 16:52 | |
|
VERIOS
|
Man, Ondřej | Operational | 27.11.2018 15:17 | |
|
WIRE-BONDER
|
Dóczy, Robert | Operational | 9.2.2018 17:08 | |
|
RIGAKU9
|
Man, Ondřej | Operational | 13.9.2018 08:13 | |
|
NANOINDENTOR
|
Králová, Veronika | Operational | 20.3.2018 14:22 | |
|
DICING-SAW
|
Klusák, Radovan | Operational | 11.5.2018 14:42 | Only for CF staff (for full-service ask Radovan Klusak) |
|
VNA-MPI
|
Urbánek, Michal | Operational | 13.5.2018 21:02 | |
|
PARYLENE
|
Pekárek, Jan | Operational | 24.5.2018 11:08 | |
|
XEF2
|
Pekárek, Jan | Operational | 24.5.2018 11:12 | |
|
3D-PRUSA MK3
|
Švarc, Vojtěch | Operational | 12.6.2018 11:10 | |
|
MECHANICAL-WORKSHOP
|
Varga, Dominik | Operational | 27.8.2018 16:23 | Only for CF staff (for full-service ask Dominik Varga) |
|
VERSALAB
|
Fernandez Baldis, Federico | Operational | 1.11.2018 08:27 | |
|
3D-PRUSA MK2.5
|
Švarc, Vojtěch | Operational | 7.11.2018 10:37 | |
|
ZEISS-Z1M
|
Holas, Jiří | Operational | 9.2.2018 17:11 | |
|
SEE-SYSTEM
|
Polášková, Kateřina | Operational | 18.7.2018 13:36 | for training and more info please contact Kateřina Polášková (polaskova.katerina@mail.muni.cz) |
|
RAMAN
|
Králová, Veronika | Operational | 28.11.2018 15:23 | UV Laser 70% operational |
|
SCIA
|
Eliáš, Marek | Operational | 6.8.2018 23:18 | |
|
FISCHIONE-TEM MILL
|
Holas, Jiří | Operational | 16.5.2018 16:06 | |
|
KAUFMAN
|
Gablech, Imrich | Operational | 26.2.2018 16:45 | |
|
micro-CT
|
Kareš, Martin | Operational | 26.2.2018 16:52 | |
|
KEITHLEY-4200
|
Šulc, Dalibor | Operational | 9.2.2018 17:07 | |
|
LASER-DICER
|
Šulc, Dalibor | Operational | 9.2.2018 16:47 | |
|
LAURELL
|
Švarc, Vojtěch | Operational | 24.5.2018 13:50 | |
|
LIBS
|
Pořízka, Pavel | Operational | 26.2.2018 16:52 | |
|
Litescope
|
Neuman, Jan | Operational | 26.2.2018 16:52 | |
|
SUSS-WETBENCH
|
Pálesch, Erik | Operational | 14.1.2019 09:50 | |
|
LPCVD-SiN
|
Münz, Filip | Operational | 9.2.2018 16:44 | |
|
LAKESHORE
|
Lišková, Zuzana | Operational | 9.2.2018 17:05 | |
|
CRYOGENIC
|
Fernandez Baldis, Federico | Operational | 9.2.2018 17:07 | |
|
MAGNETRON
|
Eliáš, Marek | Operational | 10.10.2018 16:54 | |
|
DEKTAK
|
Šulc, Dalibor | Operational | 9.2.2018 16:39 | |
|
LABOTOM5
|
Holas, Jiří | Operational | 9.2.2018 17:16 | |
|
WOOLLAM-MIR
|
Nebojsa, Alois | Operational | 9.2.2018 16:48 | |
|
CITOPRESS
|
Holas, Jiří | Operational | 9.2.2018 17:12 |