CEITEC Nano Research Infrastructure
Brno University of Technology
Purkyňova 123, 612 00 Brno
Czech Republic
+420 54114 9207 
nano@ceitec.vutbr.cz
owa | wh | sharepoint | i | feedback
Instrument status
Non operational
Some issues
Operational
| Acronym | Guarantor | Expected date of repair | Modified on | Comment |
|---|---|---|---|---|
|
NANOSAM
|
Marek Otevřel, Ph.D. | 11.4.2019 14:04 | Only Prep. ch. available. Main ch. Pressure gauge: no filament functional. Reason unknown. (Both filaments were replaced recently) | |
|
DRIE
|
Marek Eliáš, Ph.D. | 21.5.2019 15:30 | problem with controlller of substrate temperature | |
|
UHV-LEEM
|
Marek Otevřel, Ph.D. | 20.5.2019 15:29 | Problem with HV optics. A broken board identified and must be exchanged. | |
|
UHV-MBE
|
Marek Otevřel, Ph.D. | 29.4.2019 12:05 | Turbo down. | |
|
VUVAS
|
22.5.2019 | 20.5.2019 15:38 | Replacement of entrance alignement optics | |
|
VERSALAB
|
Federico José Fernandez Baldis, Ph.D. | 6/19, day to be confirmed | 4.4.2019 10:40 | replace of the cryopump and sample chamber |
|
MIRA
|
Vojtěch Švarc | 19.10.2018 09:35 | Vibrations in the lab, limited resolution, long-term solution, we´re working on it | |
|
RAITH
|
Robert Dóczy | 11.12.2018 08:54 | Process quality limited due to vibrations in the lab. We are working on long term solution. | |
|
LYRA
|
Tomáš Šamořil, Ph.D. | July 2019 | 7.1.2019 08:24 | The FIB was temporarily uninstalled. SEM part works properly. |
|
FUMEHOOD-SOLVENTS-II
|
Erik Pálesch, Ph.D. | 25.4.2019 17:26 | Heater & US in bath 1 not working. Service check planned for week 21. | |
|
KRATOS-XPS
|
Josef Polčák, Ph.D. | 10.12.2018 12:12 | Ion gun does not work, the unit sent to repair-problem found in power source-they have spare. Instrument fine after overweek unplanned power OFF. Heating in Flexi not good, position will be adjusted during next vent of the instrument. Heating in SAC works fine. | |
|
RAMAN
|
Veronika Králová, Ph.D. | 6.2.2019 16:45 | UV Laser failure - we are waiting for laser replacement (the supposed replacement date is Q3). The microscope is operational. | |
|
LEICACOAT-NANO
|
Vojtěch Švarc | 21.2.2019 18:36 | Service Gauge is known issue, maintenance will be ordered | |
|
NanoScan
|
Veronika Králová, Ph.D. | 20.3.2019 09:04 | Instalation of the system is not completed yet (electronic issue). Will be fixed in the second half of June. | |
|
SUSS-MA8
|
Vojtěch Švarc | 26.2.2019 16:52 | WEC Head error. Use only detector 365nm in constant dose mode. | |
|
WOOLLAM-VIS
|
9.2.2018 16:48 | |||
|
ZEISS-A2
|
Michal Urbánek, Ph.D. | 9.2.2018 17:16 | ||
|
PECVD
|
Marek Eliáš, Ph.D. | 18.2.2019 14:51 | ||
|
SAW-ACCUTOM
|
Jiří Holas | 9.2.2018 17:12 | ||
|
MPS150
|
Robert Dóczy | 9.2.2018 17:20 | ||
|
XERION
|
Filip Münz, Ph.D. | 10.10.2018 16:55 | ||
|
RIE-FLUORINE
|
Marek Eliáš, Ph.D. | 19.3.2019 10:26 | ||
|
ALD
|
Marek Eliáš, Ph.D. | 23.4.2019 10:18 | problem with loadlock | |
|
RIGAKU3
|
Ondřej Man, Ph.D. | 4.6.2018 13:47 | ||
|
SUSS-RCD8
|
Erik Pálesch, Ph.D. | 3.5.2019 09:46 | New motor is being tested. Use only up to 4000 RPM. | |
|
DIENER
|
Marek Eliáš, Ph.D. | 9.2.2018 16:38 | ||
|
SNOM-NANONICS
|
Petr Dvořák, Ph.D. | 9.2.2018 17:18 | ||
|
TERS
|
Filip Münz, Ph.D. | 9.2.2018 16:48 | ||
|
ICON-SPM
|
15.8.2018 16:30 | |||
|
SIMS
|
Marek Otevřel, Ph.D. | 1.4.2019 14:10 | Ongoing maintenance. | |
|
SUMMIT
|
Robert Dóczy | 9.2.2018 17:07 | ||
|
NANOCALC
|
Vojtěch Švarc | 24.5.2018 13:52 | Nanocalc is located on the VirtualBox PC (Nanocalc-PC on the desktop) on DEKTAK computer | |
|
STEMI
|
Jiří Holas | 9.2.2018 17:13 | ||
|
LEICACOAT-STAN
|
Ondřej Man, Ph.D. | 17.5.2019 12:39 | ||
|
TIC3X
|
Ondřej Man, Ph.D. | 14.1.2019 16:40 | ||
|
SW-BEAMER
|
Robert Dóczy | 22.6.2018 08:43 | ||
|
SW-LAB
|
Robert Dóczy | 22.6.2018 08:43 | ||
|
SW-TRACER
|
Robert Dóczy | 22.6.2018 08:43 | ||
|
FISCHIONE-200
|
Jiří Holas | 23.2.2018 11:55 | ||
|
TENUPOL
|
Jiří Holas | 9.2.2018 17:17 | ||
|
FISCHIONE-160
|
Jiří Holas | 9.2.2018 17:15 | ||
|
LECTROPOL
|
Jiří Holas | 9.2.2018 17:11 | ||
|
EVAPORATOR
|
Marek Eliáš, Ph.D. | 6.2.2019 16:38 | ||
|
Experimental-PECVD
|
Lenka Zajíčková, Ph.D. | 7.10.2018 12:06 | ||
|
UHV-DEPOSITION
|
Marek Otevřel, Ph.D. | 6.8.2018 13:27 | ||
|
UHV-LEIS
|
Marek Otevřel, Ph.D. | 9.2.2018 17:09 | ||
|
UHV-XPS
|
Marek Otevřel, Ph.D. | 23.4.2019 08:50 | ||
|
HELIOS
|
Ondřej Man, Ph.D. | 25.2.2019 12:11 | Worn aperture strip still in place! | |
|
UHV-PREPARATION
|
Marek Otevřel, Ph.D. | 7.1.2019 13:09 | Burnt filament at the LEED system. | |
|
UHV-PLD
|
Marek Otevřel, Ph.D. | 9.2.2018 17:10 | ||
|
UHV-SPM
|
Marek Otevřel, Ph.D. | 3.12.2018 12:21 | ||
|
FUMEHOOD-SOLVENTS-I
|
Erik Pálesch, Ph.D. | 9.2.2018 16:40 | ||
|
FISCHIONE-170
|
Jiří Holas | 9.2.2018 17:15 | ||
|
DWL
|
Erik Pálesch, Ph.D. | 17.4.2019 13:42 | ||
|
FTIR
|
Alois Nebojsa | 11.10.2018 15:46 | ||
|
CITOVAC
|
Jiří Holas | 9.2.2018 17:16 | ||
|
TEGRAMIN
|
Jiří Holas | 9.2.2018 17:11 | ||
|
TITAN
|
Ondřej Man, Ph.D. | 9.2.2018 16:52 | ||
|
VERIOS
|
Ondřej Man, Ph.D. | 22.5.2019 18:26 | ||
|
PECVD-NANOFAB
|
Marek Eliáš, Ph.D. | 19.3.2019 11:24 | ||
|
WIRE-BONDER
|
Robert Dóczy | 9.2.2018 17:08 | ||
|
RIGAKU9
|
Ondřej Man, Ph.D. | 13.9.2018 08:13 | ||
|
NANOINDENTOR
|
Veronika Králová, Ph.D. | 20.3.2018 14:22 | ||
|
DICING-SAW
|
Radovan Klusák | 11.5.2018 14:42 | Only for CF staff (for full-service ask Radovan Klusak) | |
|
VNA-MPI
|
Michal Urbánek, Ph.D. | 13.5.2018 21:02 | ||
|
TFP-2
|
Lukáš Flajšman | 24.1.2019 13:02 | ||
|
PARYLENE
|
Jan Pekárek, Ph.D. | 24.5.2018 11:08 | ||
|
XEF2
|
Jan Pekárek, Ph.D. | 24.5.2018 11:12 | ||
|
3D-PRUSA MK3
|
Vojtěch Švarc | 12.6.2018 11:10 | ||
|
MECHANICAL-WORKSHOP
|
Dominik Varga | 27.8.2018 16:23 | Only for CF staff (for full-service ask Dominik Varga) | |
|
3D-PRUSA MK2.5
|
Vojtěch Švarc | 7.11.2018 10:37 | ||
|
ZEISS-Z1M
|
Jiří Holas | 9.2.2018 17:11 | ||
|
SEE-SYSTEM
|
Kateřina Polášková | 6.5.2019 | 6.5.2019 11:25 | Contact: polaskova.katerina@mail.muni.cz |
|
SCIA
|
Marek Eliáš, Ph.D. | 6.8.2018 23:18 | ||
|
FISCHIONE-TEM MILL
|
Jiří Holas | 16.5.2018 16:06 | ||
|
KAUFMAN
|
Imrich Gablech, Ph.D. | 26.2.2018 16:45 | ||
|
micro-CT-L240
|
Martin Kareš | 26.2.2018 16:52 | ||
|
KEITHLEY-4200
|
9.2.2018 17:07 | |||
|
TXP
|
Jiří Holas | 23.1.2019 17:24 | ||
|
CPD-Autosamdri-815B
|
Jiří Zita, Ph.D. | 27.2.2019 16:34 | ||
|
RIE-CHLORINE
|
Marek Eliáš, Ph.D. | 12.4.2019 13:35 | ||
|
GLOVEBOX
|
Filip Münz, Ph.D. | 13.5.2019 15:57 | ||
|
LASER-DICER
|
9.2.2018 16:47 | |||
|
LAURELL
|
Vojtěch Švarc | 24.5.2018 13:50 | ||
|
LIBS
|
Pavel Pořízka, Ph.D. | 26.2.2018 16:52 | ||
|
Litescope
|
Jan Neuman, Ph.D. | 26.2.2018 16:52 | ||
|
SUSS-WETBENCH
|
Erik Pálesch, Ph.D. | 14.1.2019 09:50 | ||
|
LPCVD-SiN
|
Filip Münz, Ph.D. | 9.2.2018 16:44 | ||
|
LAKESHORE
|
Zuzana Lišková, Ph.D. | 9.2.2018 17:05 | ||
|
CRYOGENIC
|
Federico José Fernandez Baldis, Ph.D. | 8.2.2019 12:55 | ||
|
MAGNETRON
|
Marek Eliáš, Ph.D. | 10.10.2018 16:54 | ||
|
DEKTAK
|
Meena Dhankhar | 9.2.2018 16:39 | ||
|
MOCVD
|
Filip Münz, Ph.D. | 1.3.2019 | 5.3.2019 09:58 | Testing regime - contact guarantee for assanator training |
|
LABOTOM5
|
Jiří Holas | 9.2.2018 17:16 | ||
|
WOOLLAM-MIR
|
9.2.2018 16:48 | |||
|
CITOPRESS
|
Jiří Holas | 9.2.2018 17:12 |