CEITEC Nano Research Infrastructure
Brno University of Technology
Purkyňova 123, 612 00 Brno
Czech Republic
+420 54114 9207 
nano@ceitec.vutbr.cz
owa | wh | sharepoint | i | feedback
Instrument status
Non operational
Some issues
Operational
| Acronym | Guarantor | Expected date of repair | Modified on | Comment |
|---|---|---|---|---|
|
PECVD
|
Marek Eliáš, Ph.D. | 30.6.2019 16:05 | The ICP generator is broken. | |
|
RIE-CHLORINE
|
Marek Eliáš, Ph.D. | 26.8.2019 11:08 | the ICP generator is broken, you can use only HF power. Cleaning only by HF power. | |
|
SUSS-RCD8
|
Erik Pálesch, Ph.D. | Week 39 | 9.9.2019 11:16 | Resist pump is being serviced; other functions working |
|
MIRA
|
Vojtěch Švarc | 26.8.2019 09:21 | Virtual Beam Control Error. Vibrations in the lab, limited resolution, long-term solution, we´re working on it | |
|
TIC3X
|
Ondřej Man, Ph.D. | Week 39 (awaiting spare parts) | 27.8.2019 12:56 | Rotary stage stuck. Cross sectional polishing possible using any stage. |
|
RAITH
|
Meena Dhankhar | 11.12.2018 08:54 | Process quality limited due to vibrations in the lab. We are working on long term solution. | |
|
FUMEHOOD-SOLVENTS-II
|
Erik Pálesch, Ph.D. | Week 39 | 19.8.2019 10:07 | Heating in bath 1 (right hood) out of order. Heating elements will be exchanged. Ultrasound is working. |
|
VERIOS
|
Ondřej Man, Ph.D. | SW update scheduled for the week 37 | 19.8.2019 16:23 | EDAX TEAM unable to start-up. EDS/EBSD/WDS jobs not possible. |
|
KRATOS-XPS
|
Josef Polčák, Ph.D. | 1.10.2019 | 6.9.2019 15:13 | Reliability of flow of cooling water is getting better. However, it is recommended to check magnetic lens current if the signal is low. New flow sensor ordered, will be changed and tested. |
|
3D-PRUSA MK3
|
Vojtěch Švarc | 14.07.2019 | 1.8.2019 08:25 | Heater wire broken, undergoing maintenance and upgrade to MK3S |
|
SEE-SYSTEM
|
Kateřina Polášková | During September or October | 2.9.2019 11:33 | The sample movement in x axis is not working. Contact: lucie.blahova@ceitec.muni.cz |
|
LEICACOAT-NANO
|
Vojtěch Švarc | 21.2.2019 18:36 | Service Gauge is known issue, maintenance will be ordered | |
|
NanoScan
|
Michal Staňo | 20.3.2019 09:04 | Test operation after last (August) service visit. In-plane field option: no automatic magnet gap adjustment; only manual, every magnet has to be moved separately. | |
|
SUSS-MA8
|
Vojtěch Švarc | 26.2.2019 16:52 | WEC Head error. Use only detector 365nm in constant dose mode. | |
|
MIRA3_XMU
|
Marek Zbončák, Ph.D. | 6.9.2019 11:30 | ||
|
LPCVD-polySi
|
Filip Münz, Ph.D. | 9.2.2018 16:45 | ||
|
KERR-MICROSCOPE
|
Lukáš Flajšman | 10.9.2019 17:21 | ||
|
NIRQUEST512
|
Alois Nebojsa | 9.2.2018 17:06 | ||
|
JAZ3-CHANNEL
|
Alois Nebojsa | 9.2.2018 17:06 | ||
|
NANOSAM
|
Marek Otevřel, Ph.D. | 27.5.2019 13:31 | At the moment the new filaments are doing well | |
|
WOOLLAM-VIS
|
Alois Nebojsa | 9.2.2018 16:48 | ||
|
ZEISS-A2
|
Michal Urbánek, Ph.D. | 10.9.2019 16:44 | ||
|
SAW-ACCUTOM
|
Jiří Holas | 9.2.2018 17:12 | ||
|
MPS150
|
Jan Pekárek, Ph.D. | 9.2.2018 17:20 | ||
|
XERION
|
Filip Münz, Ph.D. | 10.10.2018 16:55 | ||
|
RIE-FLUORINE
|
Marek Eliáš, Ph.D. | 19.3.2019 10:26 | ||
|
ALD
|
Marek Eliáš, Ph.D. | 23.4.2019 10:18 | problem with loadlock | |
|
RIGAKU3
|
Ondřej Man, Ph.D. | 16.8.2019 13:20 | ||
|
DIENER
|
Marek Eliáš, Ph.D. | 9.2.2018 16:38 | ||
|
SNOM-NANONICS
|
Petr Dvořák, Ph.D. | 9.2.2018 17:18 | ||
|
TERS
|
Filip Münz, Ph.D. | 9.2.2018 16:48 | ||
|
ICON-SPM
|
Igor Turčan | 15.8.2018 16:30 | ||
|
SIMS
|
Marek Otevřel, Ph.D. | 1.4.2019 14:10 | Ongoing maintenance. | |
|
SUMMIT
|
Jan Pekárek, Ph.D. | 9.2.2018 17:07 | ||
|
NANOCALC
|
Vojtěch Švarc | 24.5.2018 13:52 | Nanocalc is located on the VirtualBox PC (Nanocalc-PC on the desktop) on DEKTAK computer | |
|
STEMI
|
Jiří Holas | 9.2.2018 17:13 | ||
|
LEICACOAT-STAN
|
Ondřej Man, Ph.D. | 17.5.2019 12:39 | ||
|
SW-BEAMER
|
Jakub Sadílek | 22.6.2018 08:43 | ||
|
DRIE
|
Marek Eliáš, Ph.D. | 12.6.2019 | 14.6.2019 13:32 | problem with controlller of substrate temperature |
|
SW-LAB
|
Jakub Sadílek | 22.6.2018 08:43 | ||
|
SW-TRACER
|
Jakub Sadílek | 22.6.2018 08:43 | ||
|
FISCHIONE-200
|
Jiří Holas | 23.2.2018 11:55 | ||
|
TENUPOL
|
Jiří Holas | 9.2.2018 17:17 | ||
|
FISCHIONE-160
|
Jiří Holas | 9.2.2018 17:15 | ||
|
LECTROPOL
|
Jiří Holas | 9.2.2018 17:11 | ||
|
EVAPORATOR
|
Marek Eliáš, Ph.D. | 30.8.2019 15:57 | ||
|
Experimental-PECVD
|
Lenka Zajíčková, Ph.D. | 10.9.2019 09:34 | ||
|
UHV-DEPOSITION
|
Marek Otevřel, Ph.D. | 6.8.2018 13:27 | ||
|
UHV-LEEM
|
Marek Otevřel, Ph.D. | 27.5.2019 13:31 | ||
|
UHV-LEIS
|
Marek Otevřel, Ph.D. | 9.2.2018 17:09 | ||
|
UHV-MBE
|
Marek Otevřel, Ph.D. | 9.9.2019 12:31 | ||
|
UHV-XPS
|
Marek Otevřel, Ph.D. | 23.4.2019 08:50 | ||
|
HELIOS
|
Ondřej Man, Ph.D. | 25.2.2019 12:11 | Worn aperture strip still in place! | |
|
UHV-PREPARATION
|
Marek Otevřel, Ph.D. | 7.1.2019 13:09 | Burnt filament at the LEED system. | |
|
LYRA
|
Tomáš Šamořil, Ph.D. | 12.9.2019 08:37 | ||
|
UHV-PLD
|
Marek Otevřel, Ph.D. | 9.2.2018 17:10 | ||
|
UHV-SPM
|
Marek Otevřel, Ph.D. | 3.12.2018 12:21 | ||
|
FUMEHOOD-SOLVENTS-I
|
Erik Pálesch, Ph.D. | 9.2.2018 16:40 | ||
|
FISCHIONE-170
|
Jiří Holas | 9.2.2018 17:15 | ||
|
DWL
|
Erik Pálesch, Ph.D. | 17.4.2019 13:42 | ||
|
FTIR
|
Alois Nebojsa | 11.10.2018 15:46 | ||
|
CITOVAC
|
Jiří Holas | 9.2.2018 17:16 | ||
|
VUVAS
|
Alois Nebojsa | 22.5.2019 | 24.5.2019 12:20 | Optics replacement complete |
|
TEGRAMIN
|
Jiří Holas | 9.2.2018 17:11 | ||
|
TITAN
|
Ondřej Man, Ph.D. | 9.2.2018 16:52 | ||
|
PECVD-NANOFAB
|
Marek Eliáš, Ph.D. | 19.3.2019 11:24 | ||
|
WIRE-BONDER
|
Marek Vaňatka | 9.2.2018 17:08 | ||
|
RIGAKU9
|
Ondřej Man, Ph.D. | 13.9.2018 08:13 | ||
|
NANOINDENTOR
|
Tomáš Plichta | 20.3.2018 14:22 | ||
|
DICING-SAW
|
Radovan Klusák | 21.6.2019 | 15.7.2019 11:10 | |
|
VNA-MPI
|
Michal Urbánek, Ph.D. | 13.5.2018 21:02 | ||
|
TFP-2
|
Lukáš Flajšman | 24.1.2019 13:02 | ||
|
PARYLENE
|
Jan Pekárek, Ph.D. | 18.6.2019 | 19.6.2019 11:20 | |
|
XEF2
|
Jan Pekárek, Ph.D. | 24.5.2018 11:12 | ||
|
MECHANICAL-WORKSHOP
|
Dominik Varga | 27.8.2018 16:23 | Only for CF staff (for full-service ask Dominik Varga) | |
|
VERSALAB
|
Federico José Fernandez Baldis, Ph.D. | 10.9.2019 17:13 | ||
|
3D-PRUSA MK2.5
|
Vojtěch Švarc | 7.11.2018 10:37 | ||
|
ZEISS-Z1M
|
Jiří Holas | 12.7.2019 11:29 | ||
|
RAMAN
|
Martin Konečný | 17.6.2019 15:03 | System is fully operational, UV laser installed. | |
|
SCIA
|
Marek Eliáš, Ph.D. | 6.8.2018 23:18 | ||
|
FISCHIONE-TEM MILL
|
Jiří Holas | 16.5.2018 16:06 | ||
|
KAUFMAN
|
Imrich Gablech, Ph.D. | 26.2.2018 16:45 | ||
|
micro-CT-L240
|
Martin Kareš | 26.2.2018 16:52 | ||
|
KEITHLEY-4200
|
Jan Pekárek, Ph.D. | 9.2.2018 17:07 | ||
|
TXP
|
Jiří Holas | 23.1.2019 17:24 | ||
|
CPD-Autosamdri-815B
|
Jiří Zita, Ph.D. | 27.2.2019 16:34 | ||
|
GLOVEBOX
|
Filip Münz, Ph.D. | 13.5.2019 15:57 | ||
|
LASER-DICER
|
Jakub Sadílek | 9.2.2018 16:47 | ||
|
LAURELL
|
Vojtěch Švarc | 15.7.2019 | 27.6.2019 10:10 | |
|
LIBS
|
Pavel Pořízka, Ph.D. | 26.2.2018 16:52 | ||
|
Litescope
|
Michal Urbánek, Ph.D. | 10.9.2019 17:17 | ||
|
SUSS-WETBENCH
|
Erik Pálesch, Ph.D. | 9.9.2019 11:15 | ||
|
LPCVD-SiN
|
Filip Münz, Ph.D. | 9.2.2018 16:44 | ||
|
LAKESHORE
|
Federico José Fernandez Baldis, Ph.D. | 9.2.2018 17:05 | ||
|
CRYOGENIC
|
Michal Urbánek, Ph.D. | 27.8.2019 12:53 | ||
|
MAGNETRON
|
Marek Eliáš, Ph.D. | 12.7.2019 14:17 | set the temperature of substrate in manual mode. | |
|
DEKTAK
|
Meena Dhankhar | 9.2.2018 16:39 | ||
|
MOCVD
|
Filip Münz, Ph.D. | 1.3.2019 | 5.3.2019 09:58 | Testing regime - contact guarantee for assanator training |
|
LABOTOM5
|
Jiří Holas | 9.2.2018 17:16 | ||
|
WOOLLAM-MIR
|
9.2.2018 16:48 | |||
|
APCVD
|
Filip Münz, Ph.D. | 9.2.2018 16:44 | ||
|
CITOPRESS
|
Jiří Holas | 9.2.2018 17:12 |