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CEITEC Nano Research Infrastructure

Brno University of Technology
Purkyňova 123, 612 00 Brno
Czech Republic

  +420 54114 9207   
  nano@ceitec.vutbr.cz 

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Research Publications Effect of deposition angle on fabrication of plasmonic gold nanocones and nanodiscs

Effect of deposition angle on fabrication of plasmonic gold nanocones and nanodiscs

Microelectronic Engineering

Liška, J.; Ligmajer, F.; Pinho N. P. V.; Kejík, L.; Kvapil, M.; Dvořák, P.; Horký, M.; Leitner, N. S.; Reimhult, E.; Šikola, T., 2020: Effect of deposition angle on fabrication of plasmonic gold nanocones and nanodiscs. MICROELECTRONIC ENGINEERING 228, p. 111326-1 - 111326-6, doi: 10.1016/j.mee.2020.111326
(LYRA, MIRA, EVAPORATOR, RIE-FLUORINE, ICON-SPM)

Equipment:

  • Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3 (LYRA)
  • Scanning Electron Microscope/E-beam writer TESCAN MIRA3Raith LIS (MIRA)
  • Electron beam evaporator BESTEC (EVAPORATOR)
  • RIE by F Chemistry and PECVD of hard C-based films Oxford Instruments Plasma Technology PlasmaPro 80 (RIE-FLUORINE)
  • Scanning Probe Microscope Bruker Dimension Icon (ICON-SPM)

Research Groups:

  • CF: CEITEC Nano
  • Fabrication and Characterisation of Nanostructures - Tomáš Šikola
  • Nanomagnetism and spintronics - Vojtěch Uhlíř

CEITEC authors:

  • Jiří Liška, Ph.D.
  • Filip Ligmajer, Ph.D.
  • Lukáš Kejík
  • Michal Kvapil, Ph.D.
  • Petr Dvořák, Ph.D.
  • Michal Horký
  • Prof. Tomáš Šikola
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