Development of HfO2/Al2O3 Stack for On-Chip Capacitor Applications

2019 42ND INTERNATIONAL SPRING SEMINAR ON ELECTRONICS TECHNOLOGY (ISSE)

Hrdy, R; Prasek, J; Fillner, P; Vancik, S; Schneider, M; Hubalek, J; Schmid, U, 2019: Development of HfO2/Al2O3 Stack for On-Chip Capacitor Applications. 2019 42ND INTERNATIONAL SPRING SEMINAR ON ELECTRONICS TECHNOLOGY (ISSE)
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