Cross section/broad beam ion polisher Leica EM TIC3X (TIC3X)


Cross section/broad beam ion polisher Leica EM TIC3X

Guarantor:
Ondřej Man, Ph.D.

Instrument status:
Operational Operational, 4.10.2019 17:14

Equipment placement:
CEITEC Nano - A1.08


Machine for polishing broad range of materialographic samples (metals, ceramics, plastics, organic species, composites of various types, porous materials) in cross-section or in planar polishing mode. Features three Ar ion guns displaced mutually by 45°, aiming at the same point, independently controllable. Three sample stages are available: one for ion milling in cross section, a rotary stage for planar polishing and a cryo stage for cross-section polishing of sensitive samples.


Publications:

Photogallery

Specification

Ion source

Ion source Triple ion source, single controllable guns
Ion energy 1 keV to 10 keV
Source current 0.5 to 4.5 mA / 0.1 mA stepsize (per ion source)
Ion current density 10 mA/cm² (per ion source)
Ion beam diameter (FWHM) 0.8 mm (at 10 keV), 2.5 mm (at 2 keV)
Gas Argon, minimal purity 99.999 % (Ar 5.0)

Sample stages

Cooling stage for cross section polishing
temperature range from +30 to –150 °C ±5 °C
warm-up temperature from +1 to +50 °C
sample size up to 25 × 20 mm x 5 mm (thick)
stage movement x-direction: ±5 mm; y: ±1 mm; z: 6 mm
 
Standard stage for cross section polishing
sample size
up to 50 × 50 mm x 5 to 10 mm (thick)
Mask position accuracy < ±2 μm
Cutting area Depth > 1 mm, Width > 4 mm
stage movement x-direction: ±5 mm; y: ±1 mm; z: 6 mm
 
Rotary stage for planar polishing
max. sample size Ø 38mm / 12mm thick
max. ion beam polished area Ø 25mm (for sample diameter of 25mm)
max. lateral movement settings
sample Ø 38mm +/- 3mm
sample Ø 35mm +/- 5mm
sample Ø 33mm +/- 6mm
sample Ø 30mm +/- 8mm
sample Ø 28mm +/- 9.5mm
sample Ø 25mm +/- 11.5mm
sample < Ø 20mm +/- 12.5mm
ion beam incident angle settings (1.5° increments)
sample Ø 38mm 0° – 12°
sample Ø 35mm 0° – 13°
sample Ø 33mm 0° – 14°
sample Ø 30mm 0° – 15°
sample Ø 28mm 0° – 16°
sample Ø 25mm 0° – 18°
sample Ø 23mm 0° – 36°
sample < Ø 20mm 0° – 48°
lateral speed setting 0.1 – 2mm/s
rotation speed setting Low (~2rpm)
Medium (~6rpm)
High (~10rpm)
 

Documents

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