Correlation of Structure and EBIC Contrast from Threading Dislocations in AlN/Si Films

Physica Status Solidi B

Vacek, P.; Kostelník, P.; Gröger, R., 2019: Correlation of Structure and EBIC Contrast from Threading Dislocations in AlN/Si Films. PHYSICA STATUS SOLIDI B 256(11), p. 1900279-1 - 1900279-7, doi: 10.1002/pssb.201900279
(LYRA, HELIOS, ICON-SPM)

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