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CEITEC Nano Research Infrastructure

Brno University of Technology
Purkyňova 123, 612 00 Brno
Czech Republic

  +420 54114 9207   
  nano@ceitec.vutbr.cz 

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Research Publications Comparative study of plasmonic antennas fabricated by electron beam and focused ion beam lithography

Comparative study of plasmonic antennas fabricated by electron beam and focused ion beam lithography

SCIENTIFIC REPORTS

HORÁK, M.; BUKVIŠOVÁ, K.; ŠVARC, V.; JASKOWIEC, J.; KŘÁPEK, V.; ŠIKOLA, T., 2018: Comparative study of plasmonic antennas fabricated by electron beam and focused ion beam lithography. SCIENTIFIC REPORTS 8(1), p. 9640 - 8, doi: 10.1038/s41598-018-28037-1; FULL TEXT
(TITAN, HELIOS, MIRA-EBL, EVAPORATOR, ICON-SPM)

Equipment:

  • High-resolution (scanning) Transmission Electron Microscope FEI Titan Themis 60-300 cubed (TITAN)
  • Focused Ion Beam/Scanning Electron Microscope FEI Helios NanoLab 660 (HELIOS)
  • Scanning Electron Microscope/E-beam writer TESCAN MIRA3Raith LIS (MIRA-EBL)
  • Electron beam evaporator BESTEC (EVAPORATOR)
  • Scanning Probe Microscope Bruker Dimension Icon (ICON-SPM)

Research Groups:

  • Fabrication and Characterisation of Nanostructures
  • CF: CEITEC Nano

CEITEC authors:

  • Michal Horák, Ph.D.
  • Kristýna Bukvišová
  • Vojtěch Švarc, Ph.D.
  • Vlastimil Křápek, Ph.D.
  • Prof. Tomáš Šikola
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