Comparative study of plasmonic antennas fabricated by electron beam and focused ion beam lithography

Scientific Reports

Horák, M.; Bukvišová, K.; Švarc, V.; Jaskowiec, J.; Křápek, V.; Šikola, T. , 2018: Comparative study of plasmonic antennas fabricated by electron beam and focused ion beam lithography. SCIENTIFIC REPORTS 8(1), p. 9640-1 - 9640-8, doi: 10.1038/s41598-018-28037-1
(TITAN, HELIOS, MIRA, EVAPORATOR, ICON-SPM)

Equipment:

• High Resolution (Scanning) Transmission Electron Microscope FEI Titan Themis 60-300 cubed (TITAN)
• Focused Ion Beam/Scanning Electron Microscope FEI Helios NanoLab 660 (HELIOS)
• Scanning Electron Microscope/E-beam writer TESCAN MIRA3 (MIRA)
• Electron beam evaporator BESTEC (EVAPORATOR)
• Scanning Probe Microscope Bruker Dimension Icon (ICON-SPM)

Research Groups:

• CF: CEITEC Nano
• Fabrication and Characterisation of Nanostructures - Tomáš Šikola

CEITEC authors:

• Michal Horák, Ph.D.
• Kristýna Bukvišová
• Vojtěch Švarc
• Vlastimil Křápek, Ph.D.
• Prof. Tomáš Šikola