Atomic Layer Deposition of MoSe2 Using New Selenium Precursors

FlatChem

Zazpe, R.; Charvot, J.; Krumpolec, R.; Hromadko, L.; Pavliňák, D.; Dvorak, F.; Knotek, P.; Michalicka, J.; Prikryl, J.; Ng, S.; Jelínková, V.; Bureš, F.; Macak, J. M., 2020: Atomic Layer Deposition of MoSe2 Using New Selenium Precursors. FLATCHEM 21, p. 100166-1 - 100166-10, doi: https://doi.org/10.1016/j.flatc.2020.100166
(TITAN)

Equipment:

Research Groups:

CEITEC authors: