Academic users

​​1. Self-service users

The preferred way of using the equipment at CEITEC Nano Research Infrastructure for academic users is self-service open access. The instrument running cost is 100% covered by CEITEC Nano, only the administration and training fee is paid by the user.

Access to all CEITEC Nano equipment via booking systemCZK (without VAT)EUR (without VAT)
User fee for new and regular users30,000/year1,154/year

Self-service users gain full independent access to all CEITEC Nano labs and access to all instruments via the booking system. Authorization to work on individual instruments is required and can be obtained after proper training.

1. Register via Perun website –
(it takes about 15min to be able to login with your new user account)

2. Print the CEITEC Nano User fee agreement & Solemn declaration and sign it. If you have a faculty advisor and/or sponsor have them sign it as well. Bring the agreement to the user office or scan and email it to

3. Thoroughly study the CEITEC Nano User Manual, then pass the exam (see Trainings->General trainings).

  • Wait to receive an email (this can take up to 5 working days) which shows your score and whether or not you passed the exam. Please note: You need to be registered via Perun website to get access link to online test - see No. 1
  • If you did not pass the exam, you can Correct and resubmit the exam at the CEITEC Nano User Manual Exam page.

4. Contact the CEITEC Nano User Office to schedule a laboratory safety excursion. The CEITEC Nano User Office can be reached via email or by phone 54114 9206.

a)  “Handling of toxic and dangerous chemical substances” training – mandatory for all users who will be in contact with dangerous chemical compounds/solutions (for example HF) – 60 min

b) Safety excursions – four options are available:

  • Full CEITEC Nano excursion – 2 hrs.
  • Nanofabrication laboratory – 45 min.
  • Nanocharacterization laboratory – 30 min.
  • Structural analysis laboratory – 30 min.

5. After you have completed all of the access requirements, you can start with the training for individual equipment.

6. During the period of your work in CEITEC Nano RI you are obliged to send us your publications (thesis, papers, articles…) and other scientific outcomes (posters, presentations…) by email to (PDF file) with Acknowledgement to CEITEC Nano RI. If you have not published any outcomes over the past year and you are going to prolong your access to the RI, please fill in the CEITEC Nano activity report and submit it with the new User fee agreement.

2. Services for academic users

For occasional users, where training is unfeasible, full-service processing of user’s samples can be provided by CEITEC Nano staff. Full-service users do not need any training, their samples are handled by CEITEC Nano staff. They can be present at the measurement only as visitors under the supervision of authorized personnel.

How to order full-service

  1. Contact the CEITEC Nano User Office at or via phone 54114 9200 to discuss your processing requirements.
  2. The CEITEC Nano financial department will send you a quotation for CEITEC Nano services. We provide support regarding internal invoicing from projects running at CEITEC and BUT. Contact CEITEC Nano financial manager Kateřina Tydlačková (+420 54114 9205) with your questions.
  3. If you agree with the quotation send the purchase order to
  4. CEITEC Nano staff will process your samples and prepare a processing/measurement report.
  5. Upon agreement an invoice will be emailed to you together with the samples or measurement data.

Prices for academic users

Valid from 1st May 2018
Academic users using the full-service pay hourly rates (listed below - VAT is not included) for the instrument use and an additional fee for the analysis of the results (if requested).

CEITEC Nano pricelist* - full service for Academic users

Nanofabrication laboratory


RAITHE-beam writer RAITH150 Two1 50058
MIRAScanning Electron Microscope/E-beam writer TESCAN MIRA31 00038
DWLUV Direct Write Laser system Heidelberg Instruments DWL 66-fs1 00038
SUSS-MA8Mask Aligner, NanoImprint Lithography SÜSS MicroTec MA8/BA8 Gen31 00038
SUSS-WETBENCHLithographic wetbench for resist coating SÜSS MicroTec1 00038
SUSS-RCD8Resist coating and development system SÜSS MicroTec RCD81 00038
LAURELLSpincoater Laurell WS-650-23B60023
NANOCALCSpectroscopic reflectometer Ocean Optics NanoCalc 200060023
DEKTAKMechanical profilometer Bruker Dektak XT1 00038
DIENERResist stripper Diener electronic NANO Plasma cleaner1 00038

Depositions and etching

EVAPORATORElectron beam evaporator BESTEC1 000**38**
MAGNETRONMagnetron sputtering systém BESTEC1 000**38**
ALDAtomic layer deposition system Ultratech/CambridgeNanoTech Fiji 2001 00038
XERIONRapid thermal annealing Xerion XREACT/1 250°C60023
PECVD-NANOFABHigh temperature PECVD of C-based materials Oxford Instruments Plasma Technology NanoFab1 00038
Experimental-PECVDPECVD with ion and mass analyzer, optical emission spectroscopy, in situ ellipsometry, langmuir probe1 00038
APCVDAtmospheric Pressure chemical vapor deposition1 00038
LPCVDLow pressure chemical vapor deposition1 00038
MOCVDMetal organic chemical vapor deposition1 00038
PECVDPECVD of Si-based materials Oxford Instruments Plasma Technology PlasmaPro 1001 00038
DRIEDeep reactive ion etching of Si-based materials Oxford Instruments Plasma Technology PlasmaPro 1001 00038
SCIAIon beam etching Scia Systems Coat 2001 00038
RIE-CHLORINEReactive ion etching of III-V semiconductors Oxford Instruments Plasma Technology PlasmaPro 1001 00038
RIE-FLUORINERIE of Si-based materials/deposition of thin films Oxford Instruments PlasmaPro NGP 801 00038


WIRE-BONDERWire bonder TPT HB 1660023
LASER-DICERLaser dicer Oxford Lasers A-Series60023

Nanocharacterization laboratory

UHV Technologies

SIMSSecondary Ion Mass Spectroscopy ION-TOF TOF.SIMS51 50058
KRATOS-XPSX-ray Photoelectron Spectroscopy Kratos Analytical Axis Supra1 50058
NANOSAMnanoScanning Auger Microscopy Scienta Omicron nanoSAM Lab1 50058
UHV-CLUSTERUltra High Vacuum Preparation and Analytical System - Custom Deposition Chamber SPECS1 50058

Microscopy and nanomanipulation

LYRAFocused Ion Beam/Scanning Electron Microscope TESCAN LYRA31 00038
ICON-SPMScanning Probe Microscope Bruker Dimension Icon1 00038
KERR-MICROSCOPEMagneto-optical Kerr microscope60023
NANOINDENTORHysitron TI 9501 00038

Optical measurements

FTIRVacuum FTIR Vertex80v + microscope Hyperion 3000 KIT1 00038
WOOLLAM-VISNIR-UV spectroscopic ellipsometer J. A. Woollam V-VASE60023
WOOLLAM-MIRMIR spectroscopic ellipsometer J. A. Woollam IR-VASE1 00038
VUVASVacuum ultraviolet spectrometer McPherson VUVAS 10001 00038
NIRQUEST512NIR Optical Spectrometer Ocean Optics NIRQuest 51260023
JAZ3UV-VIS Optical Spectrometer Ocean Optics JAZ 3-channel60023
SNOM-NANONICSScanning Near-field Optical Microscopy Nanonics Imaging MV 40001 00038
TERSScanning Probe Microscope + microRaman + PhotoLuminiscence system NT-MDT Ntegra Spectra + Solar II1 00038

Electrical and magnetic measurements

SUMMITSemi-automated 4-probe system Cascade Microtech SUMMIT 120001 00038
MPS1504-probe station Cascade Microtech MPS 15060023
KEITHLEYKeithley 4200-SCS Parameter Analyzer60023
LAKESHORELow Temperature Electro-Magnetic Properties Measurement System LakeShore CRX-EM-HF1 00038
CRYOGENICLow Temperature Vibrating Sample Magnetometr Cryogenic Limited1 00038

Structural analysis laboratory

Electron microscopy

TITANHigh resolution (scanning) Transmission Electron Microscope FEI Titan Themis 60-300 cubed2 00077
HELIOSFocused Ion Beam/Scanning Electron Microscope FEI Helios NanoLab 6601 50058
VERIOSHigh resolution Scanning Electron Microscope FEI Verios 460L1 50058

Sample preparation

STEMIStereomicroscope Zeiss Stemi 50860023
TENUPOLTEM electrolytical polisher Tenupol 560023
FISCHIONE-160TEM specimen grinding tool Fischione 16060023
FISCHIONE-170Ultrasonic TEM disc cutter Fischione 17060023
CITOVACVacuum impregnation chamber Citovac60023
LEICACOAT-STANCoater Leica EM ACE60060023
TIC3XCross section/broad beam ion polisher Leica EM TIC3X60023
FISCHIONE-200Dimple grinder Fichione 20060023
LECTROPOLElectrolytical polisher Lectropol 560023
TEGRAMINGrinder/polisher Tegramin 3060023
ZEISS-Z1MInverted light microscope Zeiss Axio Observer Z1m60023
FISCHIONE-TEM MILLIon polisher Fischione TEM Mill 105060023
LABOTOM5Metallographic saw Labotom 560023
CITOPRESSMounting press Citopress 1060023
PLASMACLEANERPlasma cleaner Fischione 102060023
SAW-ACCUTOMPrecision saw Accutom 10060023
LEICACOAT-NANOHigh vacuum coating system for electron microscopy Leica Microsystems EM ACE 60060023

X-ray diffractometry

RIGAKU9X-ray diffractometer with high brightness source Rigaku SmartLab 9kW1 00038
RIGAKU3X-ray powder diffractometer Rigaku SmartLab 3kW1 00038

Micro & Nano X-ray CT laboratory

microCTmicroCT GE phoenix v|tome|x L2403 000115
nanoCTnanoCT Rigaku nano3DX2 11281

Laser Spectroscopy laboratory

LIBSLaser-Induced Breakdown Spectroscopy2 00077

  * Prices without VAT
     Prices in EUR are approximate at the rate of 26 CZK = 1 EUR