Academic users

​​1. Self-service users


The preferred way of using the equipment at CEITEC Nano Research Infrastructure for academic users is self-service open access. The instrument running cost is 100% covered by CEITEC Nano, only the administration and training fee is paid by the user.

Access to all CEITEC Nano equipment via booking systemCZK (without VAT)EUR (without VAT)
User fee for new and regular users30,000/year1,154/year


Self-service users gain full independent access to all CEITEC Nano labs and access to all instruments via the booking system. Authorization to work on individual instruments is required and can be obtained after proper training.

1. Register via Perun website – https://idm.ics.muni.cz/ceitec/registrar/?vo=ceitec&group=CEITECNANO
(it takes about 15min to be able to login with your new user account)

2. Print the CEITEC Nano User fee agreement & Solemn declaration and sign it. If you have a faculty advisor and/or sponsor have them sign it as well. Bring the agreement to the user office or scan and email it to nano@ceitec.vutbr.cz.

3. Thoroughly study the CEITEC Nano User Manual, then pass the exam (see Trainings->General trainings).

  • Wait to receive an email (this can take up to 5 working days) which shows your score and whether or not you passed the exam. Please note: You need to be registered via Perun website to get access link to online test - see No. 1
  • If you did not pass the exam, you can Correct and resubmit the exam at the CEITEC Nano User Manual Exam page.

4. Contact the CEITEC Nano User Office to schedule a laboratory safety excursion. The CEITEC Nano User Office can be reached via email nano@ceitec.vutbr.cz or by phone 54114 9206.

a)  “Handling of toxic and dangerous chemical substances” training – mandatory for all users who will be in contact with dangerous chemical compounds/solutions (for example HF) – 60 min

b) Safety excursions – four options are available:

  • Full CEITEC Nano excursion – 2 hrs.
  • Nanofabrication laboratory – 45 min.
  • Nanocharacterization laboratory – 30 min.
  • Structural analysis laboratory – 30 min.

5. After you have completed all of the access requirements, you can start with the training for individual equipment.

6. During the period of your work in CEITEC Nano RI you are obliged to send us your publications (thesis, papers, articles…) and other scientific outcomes (posters, presentations…) by email to nano@ceitec.vutbr.cz (PDF file) with Acknowledgement to CEITEC Nano RI. If you have not published any outcomes over the past year and you are going to prolong your access to the RI, please fill in the CEITEC Nano activity report and submit it with the new User fee agreement.


2. Services for academic users

For occasional users, where training is unfeasible, full-service processing of user’s samples can be provided by CEITEC Nano staff. Full-service users do not need any training, their samples are handled by CEITEC Nano staff. They can be present at the measurement only as visitors under the supervision of authorized personnel.

How to order full-service

  1. Contact the CEITEC Nano User Office at nano@ceitec.vutbr.cz or via phone 54114 9200 to discuss your processing requirements.
  2. The CEITEC Nano financial department will send you a quotation for CEITEC Nano services. We provide support regarding internal invoicing from projects running at CEITEC and BUT. Contact CEITEC Nano financial manager Kateřina Tydlačková (+420 54114 9205) with your questions.
  3. If you agree with the quotation send the purchase order to nano@ceitec.vutbr.cz
  4. CEITEC Nano staff will process your samples and prepare a processing/measurement report.
  5. Upon agreement an invoice will be emailed to you together with the samples or measurement data.

Prices for academic users

Valid from 1st July 2019
Academic users using the full-service pay hourly rates (listed below - VAT is not included) for the instrument use and an additional fee for the analysis of the results (if requested).

CEITEC Nano pricelist* - full service for Academic users






Nanofabrication laboratory




Lithography

CZK/hourEUR/hour
RAITHE-beam writer RAITH150 Two1 800
70
MIRAScanning Electron Microscope/E-beam writer TESCAN MIRA31 300
50
DWLUV Direct Write Laser system Heidelberg Instruments DWL 66-fs1 300
50
SUSS-MA8Mask Aligner, NanoImprint Lithography SÜSS MicroTec MA8/BA8 Gen31 300
50
SUSS-WETBENCHLithographic wetbench for resist coating SÜSS MicroTec1 300
50
SUSS-RCD8Resist coating and development system SÜSS MicroTec RCD81 300
50
LAURELLSpincoater Laurell WS-650-23B900
35
NANOCALCSpectroscopic reflectometer Ocean Optics NanoCalc 2000900
35
DEKTAKMechanical profilometer Bruker Dektak XT1 300
50
DIENERResist stripper Diener electronic NANO Plasma cleaner1 300
50




Depositions and etching

CZK/hourEUR/hour
EVAPORATORElectron beam evaporator BESTEC1 300**
50**
MAGNETRONMagnetron sputtering systém BESTEC1 300**
50**
ALDAtomic layer deposition system Ultratech/CambridgeNanoTech Fiji 2001 300
50
XERIONRapid thermal annealing Xerion XREACT/1 250°C900
35
PECVD-NANOFABHigh temperature PECVD of C-based materials Oxford Instruments Plasma Technology NanoFab1 300
50
Experimental-PECVDPECVD with ion and mass analyzer, optical emission spectroscopy, in situ ellipsometry, langmuir probe1 300
50
APCVDAtmospheric Pressure chemical vapor deposition1 300
50
LPCVDLow pressure chemical vapor deposition1 300
50
MOCVDMetal organic chemical vapor deposition1 300
50
PECVDPECVD of Si-based materials Oxford Instruments Plasma Technology PlasmaPro 1001 300
50
DRIEDeep reactive ion etching of Si-based materials Oxford Instruments Plasma Technology PlasmaPro 1001 300
50
SCIAIon beam etching Scia Systems Coat 2001 300
50
RIE-CHLORINEReactive ion etching of III-V semiconductors Oxford Instruments Plasma Technology PlasmaPro 1001 300
50
RIE-FLUORINERIE of Si-based materials/deposition of thin films Oxford Instruments PlasmaPro NGP 801 300
50





Packaging

CZK/hourEUR/hour
WIRE-BONDERWire bonder TPT HB 16900
35
LASER-DICERLaser dicer Oxford Lasers A-Series900
35





Nanocharacterization laboratory




UHV Technologies

CZK/hourEUR/hour
SIMSSecondary Ion Mass Spectroscopy ION-TOF TOF.SIMS51 800
70
KRATOS-XPSX-ray Photoelectron Spectroscopy Kratos Analytical Axis Supra1 800
70
NANOSAMnanoScanning Auger Microscopy Scienta Omicron nanoSAM Lab1 800
70
UHV-CLUSTERUltra High Vacuum Preparation and Analytical System - Custom Deposition Chamber SPECS1 800
70





Microscopy and nanomanipulation

CZK/hourEUR/hour
LYRAFocused Ion Beam/Scanning Electron Microscope TESCAN LYRA31 300
50
ICON-SPMScanning Probe Microscope Bruker Dimension Icon1 300
50
KERR-MICROSCOPEMagneto-optical Kerr microscope900
35
NANOINDENTORHysitron TI 9501 300
50





Optical measurements

CZK/hourEUR/hour
FTIRVacuum FTIR Vertex80v + microscope Hyperion 3000 KIT1 300
50
WOOLLAM-VISNIR-UV spectroscopic ellipsometer J. A. Woollam V-VASE900
35
WOOLLAM-MIRMIR spectroscopic ellipsometer J. A. Woollam IR-VASE1 300
50
VUVASVacuum ultraviolet spectrometer McPherson VUVAS 10001 300
50
NIRQUEST512NIR Optical Spectrometer Ocean Optics NIRQuest 512900
35
JAZ3UV-VIS Optical Spectrometer Ocean Optics JAZ 3-channel900
35
SNOM-NANONICSScanning Near-field Optical Microscopy Nanonics Imaging MV 40001 300
50
TERSScanning Probe Microscope + microRaman + PhotoLuminiscence system NT-MDT Ntegra Spectra + Solar II1 300
50





Electrical and magnetic measurements

CZK/hourEUR/hour
SUMMITSemi-automated 4-probe system Cascade Microtech SUMMIT 120001 300
50
MPS1504-probe station Cascade Microtech MPS 150900
35
KEITHLEYKeithley 4200-SCS Parameter Analyzer900
35
LAKESHORELow Temperature Electro-Magnetic Properties Measurement System LakeShore CRX-EM-HF1 300
50
CRYOGENICLow Temperature Vibrating Sample Magnetometr Cryogenic Limited1 300
50





Structural analysis laboratory




Electron microscopy

CZK/hourEUR/hour
TITANHigh resolution (scanning) Transmission Electron Microscope FEI Titan Themis 60-300 cubed2 300
88
HELIOSFocused Ion Beam/Scanning Electron Microscope FEI Helios NanoLab 6601 800
70
VERIOSHigh resolution Scanning Electron Microscope FEI Verios 460L1 800
70





Sample preparation

CZK/hourEUR/hour
STEMIStereomicroscope Zeiss Stemi 508900
35
TENUPOLTEM electrolytical polisher Tenupol 5900
35
FISCHIONE-160TEM specimen grinding tool Fischione 160900
35
FISCHIONE-170Ultrasonic TEM disc cutter Fischione 170900
35
CITOVACVacuum impregnation chamber Citovac900
35
LEICACOAT-STANCoater Leica EM ACE600900
35
TIC3XCross section/broad beam ion polisher Leica EM TIC3X900
35
FISCHIONE-200Dimple grinder Fichione 200900
35
LECTROPOLElectrolytical polisher Lectropol 5900
35
TEGRAMINGrinder/polisher Tegramin 30900
35
ZEISS-Z1MInverted light microscope Zeiss Axio Observer Z1m900
35
FISCHIONE-TEM MILLIon polisher Fischione TEM Mill 1050900
35
LABOTOM5Metallographic saw Labotom 5900
35
CITOPRESSMounting press Citopress 10900
35
PLASMACLEANERPlasma cleaner Fischione 1020900
35
SAW-ACCUTOMPrecision saw Accutom 100900
35
LEICACOAT-NANOHigh vacuum coating system for electron microscopy Leica Microsystems EM ACE 600900
35





X-ray diffractometry

CZK/hourEUR/hour
RIGAKU9X-ray diffractometer with high brightness source Rigaku SmartLab 9kW1 300
50
RIGAKU3X-ray powder diffractometer Rigaku SmartLab 3kW1 300
50





Micro & Nano X-ray CT laboratory

CZK/hourEUR/hour
microCTmicroCT GE phoenix v|tome|x L2403 300
126
nanoCTnanoCT Rigaku nano3DX2 412
92





Laser Spectroscopy laboratory

CZK/hourEUR/hour
LIBSLaser-Induced Breakdown Spectroscopy2 300
88

 
  * Prices without VAT
** Au/Pt – 15 CZK/nm (EVAPORATOR, MAGNETRON)
     Prices in EUR are approximate at the rate of 26 CZK = 1 EUR