Beam shaping and probe characterization in the scanning electron microscope

ULTRAMICROSCOPY

ŘIHÁČEK, T.; HORÁK, M.; SCHACHINGER, T.; MIKA, F.; MATĚJKA, M.; KRÁTKÝ, S.; FOŘT, T.; RADLIČKA, T.; JOHNSON, C.; NOVÁK, L.; SEĎA, B.; MCMORRAN, B.; MÜLLEROVÁ, I., 2021: Beam shaping and probe characterization in the scanning electron microscope. ULTRAMICROSCOPY 225, p. 1 - 9, doi: 10.1016/j.ultramic.2021.113268; FULL TEXT
(HELIOS, LEICACOAT-STAN)

Equipment:

• Focused Ion Beam/Scanning Electron Microscope FEI Helios NanoLab 660 (HELIOS)
• Coater Leica EM ACE600 (LEICACOAT-STAN)

Research Groups:

• CF: CEITEC Nano
• Fabrication and Characterisation of Nanostructures

CEITEC authors:

• Michal Horák, Ph.D.