The effect of thickness and film homogeneity on the optical and microstructures of the ZrO2 thin films prepared by electron beam evaporation method

OPTICAL AND QUANTUM ELECTRONICS

SHAKOURY, R.; TALEBANI, N.; ZELATI, A.; TALU, S.; ARMAN, A.; MIRZAEI, S.; JAFARI, A., 2021: The effect of thickness and film homogeneity on the optical and microstructures of the ZrO2 thin films prepared by electron beam evaporation method. OPTICAL AND QUANTUM ELECTRONICS , p. 441-1 - 12, doi: 10.1007/s11082-021-03079-4; FULL TEXT

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