Patterning large area plasmonic nanostructures on nonconductive substrates using variable pressure electron beam lithography

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

BABOCKÝ, J.; DVOŘÁK, P.; LIGMAJER, F.; HRTOŇ, M.; ŠIKOLA, T.; BOK, J.; FIALA, J., 2016: Patterning large area plasmonic nanostructures on nonconductive substrates using variable pressure electron beam lithography. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 34(6), p. 06K801-1 - 4, doi: 10.1116/1.4966959; FULL TEXT
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