Preparation of [001] Oriented Titanium Thin Film for MEMS Applications by Kaufman Ion-beam Source

9TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH & APPLICATION (NANOCON 2017)

GABLECH, I.; CAHA, O.; SVATOŠ, V.; PRÁŠEK, J.; PEKÁREK, J.; NEUŽIL, P.; ŠIKOLA, T., 2018: Preparation of [001] Oriented Titanium Thin Film for MEMS Applications by Kaufman Ion-beam Source. 9TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH & APPLICATION (NANOCON 2017) , p. 117 - 6; FULL TEXT
(KAUFMAN, RIGAKU9)

Equipment:

• Ion-Beam Sputter Deposition System BESTEC (KAUFMAN)
• X-ray diffractometer with high brightness source Rigaku SmartLab 9kW (RIGAKU9)

Research Groups:

• CF: CEITEC Nano

CEITEC authors:

• Jan Prášek, Ph.D.
• Prof. Pavel Neužil
• Prof. Tomáš Šikola
• Ondřej Caha, Ph.D.
• Imrich Gablech, Ph.D.