Depth profiling of thin plasma-polymerized amine films using GDOES in an Ar-O-2 plasma
APPLIED SURFACE SCIENCE
KOVAČ, J.; EKAR, J.; ČEKADA, M.; ZAJÍČKOVÁ, L.; NEČAS, D.; BLAHOVÁ, L.; WANG, J.; MOZETIČ, M., 2022: Depth profiling of thin plasma-polymerized amine films using GDOES in an Ar-O-2 plasma. APPLIED SURFACE SCIENCE 581, p. 1 - 10, doi: 10.1016/j.apsusc.2021.152292; FULL TEXT
Research Groups:
- Plasma Technologies
- Development of Methods for Analysis and Measuring
- CF: CEITEC Nano
- Advanced Low-Dimensional Nanomaterials
CEITEC authors: