Experimental PECVD: ion and mass analyzer, optical emission spectroscopy, in situ ellipsometry, langmuir probe (EXPERIMENTAL-PECVD)
Operational, 11.6.2020 11:19
CEITEC Nano - C1.41
Experimental plasma enhanced CVD reactor is constructed for diagnostics of plasmachemical processes in capacitively coupled radio frequency (RF) discharges (13.56 MHz). It is possible to measure a delivered RF power, investigate presence of plasma-excited species by optical emission spectroscopy, obtain information about energy and flux of ions impinging on the substrate RF electrode, measure mass and ion energy spectra of plasma phase particles.
|CCP 13.56 MHz||max. power 600 W|
|sample size||up to 4"|
|Processes||deposition of polymer materials|
Here is place for your documents.