Spectroscopic reflectometer Ocean Optics NanoCalc 2000

Vojtěch Švarc

Multilayers characterization, resist thickness measurement mainly. Interval of measure film thickness from 10 nm up to 100 um.

NanoCalc-2000-UV/VIS

Spectral Range250 – 1100 nm
Total thickness range10 nm – 100 um
Resolution0.1 nm
Repetability0.3 nm
Absolute accuracy< 1 % (100 nm – 10 um)
Number of layersup to 10 layers
Distance with fiber1 – 5 mm
Distance with optic5 – 100 mm
Angle with optic90° (nominal incidence)
Spot size400 um (optional 100/200 um
Microspot1 – 20 um with microscope 10× / 20× / 50× magnification and MFA – Adapter
Fiber length2 m (other lengths available on request)

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