Services for commercial users 2018

    

How to order commercial full-service

Contact the CEITEC Nano User Office at nano@ceitec.vutbr.cz or via phone +420 54114 9200 to discuss your processing requirements.
The CEITEC Nano financial department will send you a quotation for CEITEC Nano services. If you have any questions regarding invoicing contact CEITEC Nano financial manager Kateřina Tydlačková (+420 51118 1252, katerina.tydlackova@ceitec.vutbr.cz) with your questions.
If you agree with the quotation send the purchase order to nano@ceitec.vutbr.cz
CEITEC Nano staff will process your samples and prepare a processing/measurement report.
Upon agreement an invoice will be emailed to you together with the samples or measurement data.

Prices for commercial users

Valid from 1st May 2018
The prices include full instrument running costs, operator’s wage, instrument depreciation and CEITEC Nano processing fee. Contact CEITEC Nano User Office at nano@ceitec.vutbr.cz for a quotation.

CEITEC Nano pricelist* - full service for Commercial users





Nanofabrication laboratory



Lihography

CZK/hour
RAITHE-beam writer RAITH150 Two3 000
MIRAScanning Electron Microscope/E-beam writer TESCAN MIRA32 210
DWLUV Direct Write Laser system Heidelberg Instruments DWL 66-fs2 120
SUSS-MA8Mask Aligner, NanoImprint Lithography SÜSS MicroTec MA8/BA8 Gen33 070
SUSS-WETBENCHLithographic wetbench for resist coating SÜSS MicroTec2 650
SUSS-RC8Resist coating and development system SÜSS MicroTec RCD82 460
LAURELLSpincoater Laurell WS-650-23B2 650
NANOCALCSpectroscopic reflectometer Ocean Optics NanoCalc 20001 970
DEKTAKMechanical profilometer Bruker Dektak XT2 190
DIENERResist stripper Diener electronic NANO Plasma cleaner2 000




Depositions and etching

CZK/hour
EVAPORATORElectron beam evaporator BESTEC3 350
MAGNETRONMagnetron sputtering systém BESTEC2 940
ALDAtomic layer deposition system Ultratech/CambridgeNanoTech Fiji 2002 780
XERIONRapid thermal annealing Xerion XREACT/1 250°C2 360
PECVD-NANOFABHigh temperature PECVD of C-based materials Oxford Instruments Plasma Technology NanoFab3 090
Experimental-PECVDPECVD with ion and mass analyzer, optical emission spectroscopy, in situ ellipsometry, langmuir probe3 480
APCVDAtmospheric Pressure chemical vapor deposition2 630
LPCVDLow pressure chemical vapor deposition2 630
MOCVDMetal organic chemical vapor deposition2 980
PECVDPECVD of Si-based materials Oxford Instruments Plasma Technology PlasmaPro 1003 480
DRIEDeep reactive ion etching of Si-based materials Oxford Instruments Plasma Technology PlasmaPro 1003 030
SCIAIon beam etching Scia Systems Coat 2003 150
RIE-CHLORINEReactive ion etching of III-V semiconductors Oxford Instruments Plasma Technology PlasmaPro 1002 480
RIE-FLUORINERIE of Si-based materials/deposition of thin films Oxford Instruments PlasmaPro NGP 803 310




Packaging

CZK/hour
WIRE-BONDERWire bonder TPT HB 161 930
LASER-DICERLaser dicer Oxford Lasers A-Series2 300




Nanocharacterization laboratory



UHV Technologies

CZK/hour
SIMSSecondary Ion Mass Spectroscopy ION-TOF TOF.SIMS53 900
KRATOS-XPSX-ray Photoelectron Spectroscopy Kratos Analytical Axis Supra3 900
NANOSAMnanoScanning Auger Microscopy Scienta Omicron nanoSAM Lab3 900
UHV-CLUSTERUltra High Vacuum Preparation and Analytical System - Custom Deposition Chamber SPECS2 600




Microscopy and nanomanipulation

CZK/hour
LYRAFocused Ion Beam/Scanning Electron Microscope TESCAN LYRA33 300
ICON-SPMScanning Probe Microscope Bruker Dimension Icon2 820
KERR-MICROSCOPEMagneto-optical Kerr microscope2 390
NANOINDENTORHysitron TI 9503 000




Optical measurements

CZK/hour
FTIRVacuum FTIR Vertex80v + microscope Hyperion 3000 KIT3 350
WOOLLAM-VISNIR-UV spectroscopic ellipsometer J. A. Woollam V-VASE2 400
WOOLLAM-MIRMIR spectroscopic ellipsometer J. A. Woollam IR-VASE2 530
VUVASVacuum ultraviolet spectrometer McPherson VUVAS 10002 210
NIRQUEST512NIR Optical Spectrometer Ocean Optics NIRQuest 5122 160
JAZ3UV-VIS Optical Spectrometer Ocean Optics JAZ 3-channel2 160
SNOM-NANONICSScanning Near-field Optical Microscopy Nanonics Imaging MV 40003 070
TERSScanning Probe Microscope + microRaman + PhotoLuminiscence system NT-MDT Ntegra Spectra + Solar II2 890




Electrical and magnetic measurements

CZK/hour
SUMMITSemi-automated 4-probe system Cascade Microtech SUMMIT 120002 820
MPS1504-probe station Cascade Microtech MPS 1502 010
KEITHLEYKeithley 4200-SCS Parameter Analyzer2 010
LAKESHORELow Temperature Electro-Magnetic Properties Measurement System LakeShore CRX-EM-HF2 780
CRYOGENICLow Temperature Vibrating Sample Magnetometr Cryogenic Limited2 920




Structural analysis laboratory



Electron microscopy

CZK/hour
TITANHigh resolution (scanning) Transmission Electron Microscope FEI Titan Themis 60-300 cubed5 800
HELIOSFocused Ion Beam/Scanning Electron Microscope FEI Helios NanoLab 6603 900
VERIOSHigh resolution Scanning Electron Microscope FEI Verios 460L3 300




Sample preparation

CZK/hour
STEMIStereomicroscope Zeiss Stemi 5081 600
TENUPOLTEM electrolytical polisher Tenupol 51 960
FISCHIONE-160TEM specimen grinding tool Fischione 1601 660
FISCHIONE-170Ultrasonic TEM disc cutter Fischione 1701 760
CITOVACVacuum impregnation chamber Citovac1 670
LEICACOAT-STANCoater Leica EM ACE6001 920
TIC3XCross section/broad beam ion polisher Leica EM TIC3X2 370
FISCHIONE-200Dimple grinder Fichione 2001 670
LECTROPOLElectrolytical polisher Lectropol 51 880
TEGRAMINGrinder/polisher Tegramin 301 910
ZEISS-Z1MInverted light microscope Zeiss Axio Observer Z1m1 770
FISCHIONE-TEM MILLIon polisher Fischione TEM Mill 10502 570
LABOTOM5Metallographic saw Labotom 51 970
CITOPRESSMounting press Citopress 101 630
PLASMACLEANERPlasma cleaner Fischione 10202 060
SAW-ACCUTOMPrecision saw Accutom 1002 020
LEICACOAT-NANOHigh vacuum coating system for electron microscopy Leica Microsystems EM ACE 6002 020




X-ray diffractometry

CZK/hour
RIGAKU9X-ray diffractometer with high brightness source Rigaku SmartLab 9kW2 960
RIGAKU3X-ray powder diffractometer Rigaku SmartLab 3kW2 600



 
*Prices without VAT


Access for self-service commercial users

Commercial users typically order measurement/nanofabrication services and their samples are processed by CEITEC Nano staff. They can be present at the measurement as visitors under the supervision of authorized personnel.

If required, self-service access to all CEITEC Nano equipment is available also to commercial users. Commercial users pay a User fee (30,000 CZK/year) plus they pay an hourly charge which includes full instrument running costs, instrument depreciation and CEITEC Nano training and processing fees. See full CEITEC Nano price list .

Please contact us at nano@ceitec.vutbr.cz to discuss your individual needs and pricing.

Commercial users

               





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