Scanning Probe Microscope Bruker Dimension Icon

Veronika Králová

The Dimension Icon’s superior resolution provides the user with a significant improvement in measurement speed and quality. The Icon is the latest evolution of our industryleading, tip-scanning AFM technology, incorporating temperature-compensating position sensors to render noise levels in the sub-angstrom range for the Z-axis, and angstroms in X-Y. This is extraordinary performance in a large-sample, 90-micron scan range system, surpassing the open-loop noise levels of highresolution AFMs. The new design of the XYZ closed-loop head also delivers higher scan speed, without loss of image quality, to enable greater throughput for data collection.

Techniques

  • Non-contact Mode       
  • Contact Mode 
  • Tapping Mode (intermittent, tapping) 
  • Phase Imaging 
  • Lateral Force Microscopy (LFM)              
  • Force Spectroscopy      
  • Force Modulation          
  • Force Volume  
  • Electric Field Microscopy (EFM)              
  • Surface Potential Microscopy / Kelvin Probe Force Microscopy              
  • Magnetic Force Microscopy (MFM)      
  • STM     
  • PeakForce TUNA/CAFM , PeakForce QNM       
  • Nanoindentation           
  • Electrochemistry + potentiostat

System is capable of measurements in ScanAsyst mode.

Scanner

Lateral range90 μm
Vertical range10 μm
Close-loop(all three axis)
Automatic approach to sample
Lateral noiseless than 0.15 nm RMS (close-loop on)
Vertical noiseless than 35 pm RMS (close-loop on)

Sample Holder

Maximum sample size210 mm in diameter
Maximum sample height15 mm
Vacuum hold
Scripting (automatic possitioning)
Repetability2 μm
Temperature range–35°C to 250°C

Optical Microscope

Resolution5MPx (1.6 μm)
Illuminationcontrol by software
View field1,465 to 180 μm

Keithley Current Source 6220 for lithography

Range100fA to 100mA
Output impedance1014 Ω


Documents

Tapping Mode Type of Analysis

ScanAsyst-Air Type of Analysis