Scanning Probe Microscope Bruker Dimension Icon (ICON-SPM)

Saeed Mirzaei, Ph.D.

Instrument status:
Operational Operational, 2.4.2020 14:50

Equipment placement:
CEITEC Nano - C1.22

The Dimension Icon’s superior resolution provides the user with a significant improvement in measurement speed and quality. The Icon is the latest evolution of our industryleading, tip-scanning AFM technology, incorporating temperature-compensating position sensors to render noise levels in the sub-angstrom range for the Z-axis,
and angstroms in X-Y. This is extraordinary performance in a large-sample, 90-micron scan range system, surpassing the open-loop noise levels of highresolution AFMs. The new design of the XYZ closed-loop head also delivers higher scan speed, without loss of image quality, to enable greater throughput for data collection.


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  • Non-contact Mode       
  • Contact Mode 
  • Tapping Mode (intermittent, tapping) 
  • Phase Imaging 
  • Lateral Force Microscopy (LFM)              
  • Force Spectroscopy      
  • Force Modulation          
  • Force Volume  
  • Electric Field Microscopy (EFM)              
  • Surface Potential Microscopy / Kelvin Probe Force Microscopy              
  • Magnetic Force Microscopy (MFM)      
  • STM     
  • PeakForce TUNA/CAFM , PeakForce QNM       
  • Nanoindentation           
  • Electrochemistry + potentiostat

System is capable of measurements in ScanAsyst mode.


Lateral range 90 μm
Vertical range 10 μm
Close-loop (all three axis)
Automatic approach to sample
Lateral noise less than 0.15 nm RMS (close-loop on)
Vertical noise less than 35 pm RMS (close-loop on)

Sample Holder

Maximum sample size 210 mm in diameter
Maximum sample height 15 mm
Vacuum hold
Scripting (automatic possitioning)
Repetability 2 μm
Temperature range –35°C to 250°C

Optical Microscope

Resolution 5MPx (1.6 μm)
Illumination control by software
View field 1,465 to 180 μm

Keithley Current Source 6220 for lithography

Range 100fA to 100mA
Output impedance 1014 Ω


Tapping Mode Type of Analysis

ScanAsyst-Air Type of Analysis


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