Synthesis and structural properties of Mo-S-N sputtered coatings

APPLIED SURFACE SCIENCE

Hebbar Kannur, K.; Yaqub, T. B.; Huminiuc, T.; Polcar, T.; Pupier, C.; Héau, C.; Cavaleiro, A., 2020: Synthesis and structural properties of Mo-S-N sputtered coatings. APPLIED SURFACE SCIENCE 527, p. 146790-1 - 13, doi: 10.1016/j.apsusc.2020.146790; FULL TEXT
(TITAN, HELIOS)

Equipment:

• High-resolution (scanning) Transmission Electron Microscope FEI Titan Themis 60-300 cubed (TITAN)
• Focused Ion Beam/Scanning Electron Microscope FEI Helios NanoLab 660 (HELIOS)

Research Groups:

• CF: CEITEC Nano