Preparation of (001) preferentially oriented titanium thin films by ion-beam sputtering deposition on thermal silicon dioxide

JOURNAL OF MATERIALS SCIENCE

GABLECH, I.; SVATOŠ, V.; CAHA, O.; HRABOVSKÝ, M.; PRÁŠEK, J.; HUBÁLEK, J.; ŠIKOLA, T., 2016: Preparation of (001) preferentially oriented titanium thin films by ion-beam sputtering deposition on thermal silicon dioxide. JOURNAL OF MATERIALS SCIENCE 51(7), p. 3329 - 8, doi: 10.1007/s10853-015-9648-y; FULL TEXT
(KAUFMAN, RIGAKU9, ICON-SPM)

Equipment:

Research Groups:

CEITEC authors: