Preparation of high-quality stress-free (001) aluminum nitride thin film using a dual kaufman ion-beam source setup

THIN SOLID FILMS

GABLECH, I.; SVATOŠ, V.; CAHA, O.; DUBROKA, A.; PEKÁREK, J.; KLEMPA, J.; NEUŽIL, P.; SCHNEIDER, M.; ŠIKOLA, T., 2019: Preparation of high-quality stress-free (001) aluminum nitride thin film using a dual kaufman ion-beam source setup. THIN SOLID FILMS 670, p. 105 - 8, doi: 10.1016/j.tsf.2018.12.035; FULL TEXT
(KAUFMAN, RIGAKU9, WOOLLAM-VIS, ICON-SPM)

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