NIR-UV spectroscopic ellipsometer J. A. Woollam V-VASE

Alois Nebojsa

The VASE is most accurate and versatile ellipsometer for research on all types of materials: semiconductors, dielectrics, polymers, metals, multi-layers, and more. It combines high accuracy and precision with a wide spectral range from 193 to 2000nm. Variable wavelength and angle of incidence allow flexible measurement capabilities.
|* Reflection and Transmission Ellipsometry| |
|* Generalized Ellipsometry | |
|* Reflectance ® intensity | |
|* Transmittance (T) intensity | |
|* Cross-polarized R/T | |
|* Depolarization | |
|* Scatterometry | |
|* Mueller-matrix | | 

Features

Spectral range193 – 2000 nm
Retarderyes
Rotating analyser
Sample holdervertical
Angle of incidence35° – 90°
MonochromatorHS 190 (Woollam)

Advanced

Focusing probesDecreases the light beam to 200 microns in diameter