Mechanical profilometer Bruker Dektak XT

   

Meena Dhankhar

The DektakXT stylus surface profiler is an advanced thin and thick film step height measurement tool. In addition to profiling surface topography and waviness, the DektakXT system measures roughness in the nanometer range. Available with a standard manual sample-positioning stage or an optional automatic X-Y or theta stage, it provides a stepheight repeatability of 5 Å (< 0.6 nm). In addition to taking twodimensional surface profile measurements, the DektakXT system can produce three-dimensional measurements and analyses when equipped with the 3D Mapping Option.


In addition to taking two-dimensional surface profile measurements, the DektakXT system can produce three-dimensional measurements and analyses when equipped with the 3D Mapping Option. With the N-Lite+ Option, it can allow low-force stylus engagement and scanning, optimized to protect force-sensitive samples.

     

Stage diameter of 200 mm
Max. points120
Repeability5 Å
Vertical resolution1 Å 
Pulse freq.1 - 200 Hz
Resolution0.5 μm
Repeteability1 μm
Vertical range56 mm

DEKTAK A4 poster