Mechanical profilometer Bruker Dektak XT


Dalibor Šulc

The DektakXT® stylus surface profiler is an advanced thin and thick film step height measurement tool. In addition to profiling surface topography and waviness, the DektakXT system measures roughness in the nanometer range. Available with a standard manual sample-positioning stage or an optional automatic X-Y or theta stage, it provides a step-height repeatability of 5Å (<0.6 nm).

In addition to taking two-dimensional surface profile measurements, the DektakXT system can produce three-dimensional measurements and analyses when equipped with the 3D Mapping Option. With the N-Lite+ Option, it can allow low-force stylus engagement and scanning, optimized to protect force-sensitive samples.

Repeatibility< 5 Å
Vertical resolution
1 Å
Maximum points in line120
Stagedia. of 200 mm
Downforce0,03 mg – 15 mg
Tip radius50 nm, 2 µm, 12,5 µm, 25 µm

Sample limitations

Sample height50 mm
Maximum step height1 mm
Maximum scan length55 mm (200mm via stitching)