LAURELL-SPIN COATER (LAURELL)
Operational, 27.6.2019 10:10
CEITEC Nano - C1.30
The Laurell WS-650-23 B spin coater is compact and packed with advanced features. This 650-series coater system will accommodate up to ø150mm wafers and 5´ × 5´ (127mm × 127mm) substrates, and features a maximum rotational speed of 12,000 RPM (based on a ø100mm silicon wafer).
|Sample size:||5x5 mm^2 to 150 mm / 6 inch (125x125 mm^2)|
|Maximum rotation speed:||12,000 RPM|
|Acceleration:||from 1 RPM increment|
Reusable process chamber liner, made from Teflon
Wafer Alignment Tool
Chucks and Adapters for samples with different size
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