LAURELL-SPIN COATER (LAURELL)


LAURELL-SPIN COATER

Guarantor:
Vojtěch Švarc

Instrument status:
Operational Operational, 27.6.2019 10:10

Equipment placement:
CEITEC Nano - C1.30


The Laurell WS-650-23 B spin coater is compact and packed with advanced features. This 650-series coater system will accommodate up to ø150mm wafers and 5´ × 5´ (127mm × 127mm) substrates, and features a maximum rotational speed of 12,000 RPM (based on a ø100mm silicon wafer).

Photogallery

Specification

Sample size: 5x5 mm^2 to 150 mm / 6 inch (125x125 mm^2)
Maximum rotation speed: 12,000 RPM
Acceleration: from 1 RPM increment
Instruments:

Reusable process chamber liner, made from Teflon

Wafer Alignment Tool

Chucks and Adapters for samples with different size

Documents

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