Machine for creating thin electron transparent specimens for TEM. TEM Mill incorporates two independently adjustable ion sources, liquid nitrogen specimen cooling, automatic gas control, and a vacuum system for ultra-clean specimen processing. The specimen holder accommodates double-sided milling to 0° without specimen shadowing. Tilt angles are adjustable in the range from –10° to +10°. In addition to full specimen rotation with ion beam sequencing, the programmable rocking angle control is available. The TEM Mill includes a microscope with CCD camera for better specimen viewing and polishing process control.
|Ion source||Two ion guns, single controllable|
|Ion source energy||from 100 eV to 6 keV|
|Beam current density||up to 10 mA/cm2|
|Process gas||Argon, 99,999 % purity|
|Milling angle range||–10° to +10°|
|Specimen rotation||available with motion sequencing|