High resolution (scanning) Transmission Electron Microscope FEI Titan Themis 60-300 cubed

Jan Michalička

The TEM FEI Titan™ Themis provides easy access to atomic information about electron transparent samples. The microscope combines high-brightness X-FEG module with monochromator, 3-lens condenser, SUPER-X EDX detector, image (Cs)-corrector and high-end GATAN GIF Quantum ERS/966 energy filter for EELS and EFTEM to achieve comprehensive results. Thanks to new enhanced piezo stage, FEI Ceta 4kx4k 16-bit CMOS camera, multiple STEM detectors (BF, ADF and HAADF), variation of analytical holders (ST, DT, Tomographic and Cryo), implemented Lorentz lens and sophisticated SWs for data acquisition and post-processing the microscope can be used as a complex and automated tool for materials science.

Electron source: X-FEG ultra-stable, high brightness Schottky field emitter gun.

Monochromator: Narrows the energy spread of electron’s source down to as low as 100 meV and this boosts lateral resolution in HR-TEM imaging to 70 pm and enables EEL spectroscopic studies of electronic structures, e.g. in plasmonics
or chemical bondings.

Accelerator 60-300 kV: Offers penetration power for dense materials, high contrast for light compounds, or minimizing knock-on damage of beam sensitive samples. The microscope is alligned for high tensions at 60 kV, 120 kV and 300 kV.

3-lens condenser system: Is optimized for large range of paralel illlumination in TEM mode and allows broad range of convergent angles. Enables NBED analysis.

ChemiSTEM: Is a FEI ultimate EDX technology for fast and sensitive chemical analysis. It includes high brightness
X-FEG Shotky electron gun, SUPER-X spectrometer with 4x30mm2 SSD windowless detectors offering 0.7 srad solid angle, and 100,000 spectra/sec fast data acquisition.

Image corrector: Is spherical aberration (Cs)-corrector, CEOS GmbH, which boosts the resolution of the HR-TEM mode to the sub-Angström level. It minimizes the effect of delocalisation in HR-TEM imaging which enables to determine artefact free atomic coordinates.

Lorentz lens: Is located within the lower pole piece of the objective lens and enables to image magnetic structures in field-free conditions (the objective lens is turned off). Focusing the Lorentz lens allows imaging of magnetic domains with different properties.

Projector system: Is constant power and ultra stable 4 lens optic system and enables large range of magnifications for imaging, large range of camera length for diffraction, STEM or EELS applications and maximises collection angles for high sensitivity measurements.

CETA 16M™ camera: Is a fast 4kx4k 16-bit CMOS based high tension flexible sensor with a robust fiber optic-coupled scintillator allowing high dynamic range imaging with instant zoom into images for fast navigation from mesoscopic to atomic scale.

GIF QUANTUM ERS/966: Is a post-column energy filter, Gatan, Inc., alowing to form energy-filtered images, energy-filtered diffraction patterns and electron energy-loss spectra. The Quantum™ ERS is perfectly matched to monochromated electron beam, enabling high-resolution EELS (below 0.2 eV) of both core-level and valance state transitions. The system includes STEMPack, high speed spectrum imaging, DualEELS™ and high-speed 2kV VSM upgrades for ultrafast hardware synchronized S/TEM EELS spectrum imaging at two energies.


STEM detectors:
HAADF detector (Fischione)
Triple DF1/DF2/BF detectors (FEI)
ADF and BF detectors (Gatan)


Specimen holders:
CompuStage Single-Tilt Holder (FEI)
CompuStage High-Visibility, Low-Background, Double-Tilt Specimen Holder (FEI)
Tomography Single-Tilt Holder (Fischione)
Double Tilt Liquid Nitrogen Cooling Holder Model 636 (Gatan)


Analytical software:
TIA
VELOX
AVIZO
Digital Micrograph, GSM 2


RESOLUTION and DETECTION LIMITS:

TEM INFORMATION LIMIT (300 kV)≤ 70 pm
TEM INFORMATION LIMIT (120 kV)≤ 90 pm
TEM INFORMATION LIMIT (60 kV)≤ 100 pm
TEM RESOLUTION (300 kV), LORENTZ MODE≤ 2 nm
STEM RESOLUTION (300 kV)≤ 136 pm
PIEZO STAGE STEP≥ 20 pm
EDX ENERGY RESOLUTION≤ 136 eV (Mn-Kα, 10 kcps)

≤ 140 eV (Mn-Kα, 100 kcps)
EDX DETECTION LIMITZ ≥ 5 (Boron)
EEELS ENERGY RESOLUTION≤ 0.2 eV


List of publications:



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