High resolution Scanning Electron Microscope FEI Verios 460L

Ondřej Man

The Verios 460L is an unconventional SEM. Through clever design, the Verios 460L allows for ultra-high resolution imaging at low energy on insulating samples with no conductive coating. The Verios 460L is equipped with a wide array of low and high energy electron detectors including a transmission detector and an energy dispersive X-ray spectrometer.

Electron column/optics specifications

Electron column typeElstar UC
Electron source typeSchottky FEG with monochromator
Imaging modesfield free
XHR immersion
EDS optimized
Beam deceleration (stage bias – 20 V to – 4 kV
Probe current0.8 to 100 nA
Landing energy20 eV to 30 keV

Detectors available

Imaging detectorsAnalytical detectorsOthers
in-lens SE detector (TLD-SE)energy dispersive spectrometer (EDS)IR camera for viewing sample/column
in-lens BSE detector (TLD-BSE)wavelength dispersive spectrometer (WDS)Chamber mounted Nav-Cam+
in-column SE detector (ICD)electron backscatter diffraction detector (EBSD)Integrated beam current measurement
in-column BSE detector (MD)

Everhart-Thornley SE detector (ETD)
forward-scattered electrons detector (FSD)
Retractable low voltage, solid-state backscatter electron detector (DBS)
Retractable STEM detector with BF/DF/HAADF segments

Resolution

Top resolutionConditions
0.6 nm30 kV (STEM)
0.6 nm15 – 2 kV
0.7 nm1 kV
1.0 nm500 V (ICD)

Sample stage

Stage typeUltra high precision 5-axes piezo-motorized stage
AxisMaximum movement [mm]
X, Y100
Z20
tilt– 10 ° to + 60 °
rotation720 ° stroke
Positioning accuracy/repe­atability
X, Y repeatability 0.5 μm
X, Y accuracy < 1.5 μm (85 % tolerance interval)
Mechanically tilt eucentric stage with < 5 μm image motion when tilting 0 ° to 52 °

Maximum sample sizes

Maximum size100 mm diameter with full rotation
Maximum sample thickness (via loadlock)15 mm incl. holder
Maximum sample thickness (via chamber door)27.8 mm incl. sample holder
Weight200 g (incl. holder)
Please avoid introduction of your samples via chamber door as much as possible!

Installed utility devices

Plasma cleaner (mounted on the chamber)
Cryo cleaner (mounted on the chamber)
Fully motorized loadlock

Analytical detectors specifications

DetectorParameterSpecified value
EDSDetector typeEDAX SDD Octane Super
Detector chip area60 mm2
Energy resolution-specified129 eV @ MnKα
Energy resolution-measured131.2 eV @ MnKα

EBSDDetector typeEDAX DigiView IV
Detector camera resolution1392 (H) x 1040 (V) x 12 bits
Selectable Binning Modes1×1
1×2
2×2
4×4
8×8
10×10
Signal / Noise Ratio> 65 dB
Data collection rateup to 150 indexed pps

WDSDetector typeEDAX TEXS HP XM 4
Installed crystals
Crystal typeInterplanar distance 2d [nm]
PV7000/384.01
PV7000/3375.47
PV7000/3560.491
PV7000/4329.769
PV7000/368.721
Energy resolution
Element / lineResolution – specified [eV]
C / Kα13
N / Kα18
O / Kα17
Cu / Lα30
Al / Kα28
Si / Kα6
Cu / Kα75

               ​​​                ​