Experimental PECVD: ion and mass analyzer, optical emission spectroscopy, in situ ellipsometry, langmuir probe (EXPERIMENTAL-PECVD)
Lenka Zajíčková, Ph.D.
Operational, 11.6.2020 11:19
CEITEC Nano - C1.41
Experimental plasma enhanced CVD reactor is constructed for diagnostics of plasmachemical processes in capacitively coupled radio frequency (RF) discharges (13.56 MHz). It is possible to measure a delivered RF power, investigate presence of plasma-excited species by optical emission spectroscopy, obtain information about energy and flux of ions impinging on the substrate RF electrode, measure mass and ion energy spectra of plasma phase particles.
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