Deposition of ternary oxides with titanium and characterization of their optical and electrical properties

Master´s thesis

Vida, J., 2019: Deposition of ternary oxides with titanium and characterization of their optical and electrical properties. MASTER´S THESIS , p. 1 - 50
(ALD, WOOLLAM-VIS, VUVAS, EVAPORATOR, SUSS-MA8, SUMMIT, KRATOS-XPS, RIGAKU3)

Equipment:

• Atomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200 (ALD)
• NIR-UV spectroscopic ellipsometer J. A. Woollam V-VASE (WOOLLAM-VIS)
• Vacuum ultraviolet spectrometer McPherson VUVAS 1000 (VUVAS)
• Electron beam evaporator BESTEC (EVAPORATOR)
• Mask Aligner, NanoImprint Lithography SÜSS MicroTec MA8/BA8 Gen3 (SUSS-MA8)
• Semi-automated 4-probe system Cascade Microtech SUMMIT 12000 (SUMMIT)
• X-ray Photoelectron Spectroscopy Axis Supra (KRATOS-XPS)
• X-ray powder diffractometer Rigaku SmartLab 3kW (RIGAKU3)

Research Groups:

• CF: CEITEC Nano