Coater Leica EM ACE600

Guarantors

Ondřej Man - LEICACOAT-STAN
Vojtěch Švarc - LEICACOAT-NANO

Description

High vacuum coater for deposition of conductive coatings on SEM and TEM samples. Processes are driven by bulit-in microprocessor control unit and are fully automatized. Process steps and parameters are set through a touch screen.
Equipped with Au sputter target and carbon thread evaporation source as standard.
Other targets for sputtering available on request.

Photogallery

 

Specification

Process vacuum5x10−5 mbar @ 15 min
Ultimate vacuum2x10−6 mbar @ 24 hour
Working distancemin. 30 mm, max. 100 mm (z movement motorized)
Specimen tablediameter 104 mm
Stage tilt+/- 60° (motorized)
Coating time1–1800 s (without respect to sample damage)
Coating thickness1–1000 nm
Coating thickness detectionoscillating quartz crystal, readout resolution: one decimal (0.1 nm accuracy)
Process gas for sputteringArgon 99,99 % or better
Venting gasNitrogen 99,99 %

Available materials for deposition

MaterialDeposition methodDeposition source
Carbon (C)evaporationcarbon thread
Gold (Au)sputteringtarget
Platinum-Palladium (Pt-Pd: 80/20)sputteringtarget
Titanium (Ti)sputteringtarget
Nickel (Ni)sputteringtarget
Gold-Palladium (Au-Pd: 80/20)sputteringtarget
Chromium (Cr)sputteringtarget

Documents

Application Note 1 - Deposition of layers of defined thickness using thickness monitor
Application Note 2 - Incorrect layer thickness

 

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