Access for academic users

​​1. Self-service users

The preferred way of using the equipment at CEITEC Nano Research Infrastructure for academic users is self-service open access. The instrument running cost is 100% covered by CEITEC Nano, only the administration and training fee is paid by the user.

Access to all CEITEC Nano equipment via booking systemCZK (without VAT)
User fee for new and regular users30,000/year

Self-service users gain full independent access to all CEITEC Nano labs and access to all instruments via the booking system. Authorization to work on individual instruments is required and can be obtained after proper training.

1. Register via Perun website –
    (it takes about 15min to be able to login with your new user account)

2. Print the CEITEC Nano User fee agreement and sign it. If you have a faculty advisor and/or sponsor have them sign it as well. Bring the agreement to the user office or scan and email it to

3. Thoroughly study the CEITEC Nano User Manual, then pass the exam (see Trainings->General trainings).

  • Wait to receive an email (this can take up to 5 working days) which shows your score and whether or not you passed the exam. Please note: You need to be registered via Perun website to get access link to online test - see No. 1
  • If you did not pass the exam, you can Correct and resubmit the exam at the CEITEC Nano User Manual Exam page.

4. Contact the CEITEC Nano User Office to schedule a laboratory safety excursion. The CEITEC Nano User Office can be reached via email or by phone 54114 9206.

  • Full CEITEC Nano excursion – 2 hrs.
  • Nanofabrication laboratory – 45 min.
  • Nanocharacterization laboratory – 30 min.
  • Structural analysis laboratory – 30 min.

5. After you have completed all of the access requirements, you can start with the training for individual equipment.

2. Services for academic users

For occasional users, where training is unfeasible, full-service processing of user’s samples can be provided by CEITEC Nano staff. Full-service users do not need any training, their samples are handled by CEITEC Nano staff. They can be present at the measurement only as visitors under the supervision of authorized personnel.

How to order full-service

  1. Contact the CEITEC Nano User Office at or via phone 54114 9200 to discuss your processing requirements.
  2. The CEITEC Nano financial department will send you a quotation for CEITEC Nano services. We provide support regarding internal invoicing from projects running at CEITEC and BUT. Contact CEITEC Nano financial manager Kateřina Tydlačková (+420 54114 9205) with your questions.
  3. If you agree with the quotation send the purchase order to
  4. CEITEC Nano staff will process your samples and prepare a processing/measurement report.
  5. Upon agreement an invoice will be emailed to you together with the samples or measurement data.

Prices for academic users

Valid from 1st July 2017
Academic users using the full-service pay hourly rates (listed below - VAT is not included) for the instrument use and an additional fee for the analysis of the results (if requested).

CEITEC Nano pricelist* - full service for Academic users

Nanofabrication laboratory


RAITHE-beam writer RAITH150 Two1 320
MIRAScanning Electron Microscope/E-beam writer TESCAN MIRA3760
DWLUV Direct Write Laser system Heidelberg Instruments DWL 66-fs830
SUSS-MA8Mask Aligner, NanoImprint Lithography SÜSS MicroTec MA8/BA8 Gen3770
SUSS-WETBENCHLithographic wetbench for resist coating SÜSS MicroTec980
LAURELLSpincoater Laurell WS-650-23B980
NANOCALCSpectroscopic reflectometer Ocean Optics NanoCalc 2000630
DEKTAKMechanical profilometer Bruker Dektak XT680
DIENERResist stripper Diener electronic NANO Plasma cleaner530

Depositions and etching

EVAPORATORElectron beam evaporator BESTEC680
MAGNETRONMagnetron sputtering systém BESTEC680
ALDAtomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200670
PECVD-NANOFABHigh temperature PECVD of C-based materials Oxford Instruments Plasma Technology NanoFab830
Experimental-PECVDPECVD with ion and mass analyzer, optical emission spectroscopy, in situ ellipsometry, langmuir probe760
LPCVDLow pressure chemical vapor deposition730
PECVDPECVD of Si-based materials Oxford Instruments Plasma Technology PlasmaPro 1001 140
DRIEDeep reactive ion etching of Si-based materials Oxford Instruments Plasma Technology PlasmaPro 100850
RIE-FLUORINERIE of Si-based materials/deposition of thin films Oxford Instruments PlasmaPro NGP 80710
SCIAIon beam etching Scia Systems Coat 200640
XERIONRapid thermal annealing Xerion XREACT/1 250°C720


WIRE-BONDERWire bonder TPT HB 16490
LASER-DICERLaser dicer Oxford Lasers A-Series510

Nanocharacterization laboratory

UHV Technologies

SIMSSecondary Ion Mass Spectroscopy ION-TOF TOF.SIMS5980
KRATOS-XPSX-ray Photoelectron Spectroscopy Kratos Analytical Axis Supra770
NANOSAMnanoScanning Auger Microscopy Scienta Omicron nanoSAM Lab770
UHV-DEPOSITIONUltra High Vacuum Preparation and Analytical System - Custom Deposition Chamber SPECS580
UHV-LEEMUltra High Vacuum Preparation and Analytical System - Low Energy Electron Microscope SPECS FE-LEEM P90680
UHV-LEISUltra High Vacuum Preparation and Analytical System - Low Energy Ion Spectroscopy ION-TOF Qtac 100550
UHV-MBEUltra High Vacuum Preparation and Analytical System - Molecular Beam Epitaxy SPECS760
UHV-XPSUltra High Vacuum Preparation and Analytical system - Photoelectron Spectroscopy SPECS Phoibos 150550
UHV-PREPARATIONUltra High Vacuum Preparation and Analytical System - Preparation Chamber SPECS530
UHV-SPMUltra High Vacuum Preparation and Analytical System - Scanning Probe Microscopy SPECS Aarhus 150 SPM580

Microscopy and nanomanipulation

LYRAFocused Ion Beam/Scanning Electron Microscope TESCAN LYRA3850
ICON-SPMScanning Probe Microscope Bruker Dimension Icon500
KERR-MICROSCOPEMagneto-optical Kerr microscope490
NANOINDENTORHysitron TI 950500

Optical measurements

FTIRVacuum FTIR Vertex80v + microscope Hyperion 3000 KIT660
WOOLLAM-VISNIR-UV spectroscopic ellipsometer J. A. Woollam V-VASE540
WOOLLAM-MIRMIR spectroscopic ellipsometer J. A. Woollam IR-VASE540
VUVASVacuum ultraviolet spectrometer McPherson VUVAS 1000540
NIRQUEST512NIR Optical Spectrometer Ocean Optics NIRQuest 512490
JAZ3UV-VIS Optical Spectrometer Ocean Optics JAZ 3-channel490
SNOM-NANONICSScanning Near-field Optical Microscopy Nanonics Imaging MV 4000560
TERSScanning Probe Microscope + microRaman + PhotoLuminiscence system NT-MDT Ntegra Spectra + Solar II560

Electrical and magnetic measurements

SUMMITSemi-automated 4-probe system Cascade Microtech SUMMIT 12000530
MPS1504-probe station Cascade Microtech MPS 150490
KEITHLEYKeithley 4200-SCS Parameter Analyzer490
LAKESHORELow Temperature Electro-Magnetic Properties Measurement System LakeShore CRX-EM-HF530
CRYOGENICLow Temperature Vibrating Sample Magnetometr Cryogenic Limited550

Structural analysis laboratory

Electron microscopy

TITANHigh resolution (scanning) Transmission Electron Microscope FEI Titan Themis 60-300 cubed2 330
HELIOSFocused Ion Beam/Scanning Electron Microscope FEI Helios NanoLab 6601 490
VERIOSHigh resolution Scanning Electron Microscope FEI Verios 460L1 140

Sample preparation

STEMIStereomicroscope Zeiss Stemi 508320
TENUPOLTEM electrolytical polisher Tenupol 5410
FISCHIONE-160TEM specimen grinding tool Fischione 160360
FISCHIONE-170Ultrasonic TEM disc cutter Fischione 170360
CITOVACVacuum impregnation chamber Citovac380
TIC3XCross section/broad beam ion polisher Leica EM TIC3X500
FISCHIONE-200Dimple grinder Fichione 200340
LECTROPOLElectrolytical polisher Lectropol 5420
TEGRAMINGrinder/polisher Tegramin 30570
ZEISS-Z1MInverted light microscope Zeiss Axio Observer Z1m320
FISCHIONE-TEM MILLIon polisher Fischione TEM Mill 1050500
LABOTOM5Metallographic saw Labotom 5670
CITOPRESSMounting press Citopress 10370
PLASMACLEANERPlasma cleaner Fischione 1020500
SAW-ACCUTOMPrecision saw Accutom 100660

X-ray diffractometry

RIGAKU9X-ray diffractometer with high brightness source Rigaku SmartLab 9kW670
RIGAKU3X-ray powder diffractometer Rigaku SmartLab 3kW610

Micro & Nano X-ray CT laboratory

microCTmicroCT GE phoenix v|tome|x L2403 000
nanoCTnanoCT Rigaku nano3DX2 200

*Prices without VAT

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