Access for academic users 2018

​​1. Self-service users

The preferred way of using the equipment at CEITEC Nano Research Infrastructure for academic users is self-service open access. The instrument running cost is 100% covered by CEITEC Nano, only the administration and training fee is paid by the user.

Access to all CEITEC Nano equipment via booking systemCZK (without VAT)
User fee for new and regular users30,000/year

Self-service users gain full independent access to all CEITEC Nano labs and access to all instruments via the booking system. Authorization to work on individual instruments is required and can be obtained after proper training.

1. Register via Perun website –
    (it takes about 15min to be able to login with your new user account)

2. Print the CEITEC Nano User fee agreement and sign it. If you have a faculty advisor and/or sponsor have them sign it as well. Bring the agreement to the user office or scan and email it to

3. Thoroughly study the CEITEC Nano User Manual, then pass the exam (see Trainings->General trainings).

  • Wait to receive an email (this can take up to 5 working days) which shows your score and whether or not you passed the exam. Please note: You need to be registered via Perun website to get access link to online test - see No. 1
  • If you did not pass the exam, you can Correct and resubmit the exam at the CEITEC Nano User Manual Exam page.

4. Contact the CEITEC Nano User Office to schedule a laboratory safety excursion. The CEITEC Nano User Office can be reached via email or by phone 54114 9206.

  • Full CEITEC Nano excursion – 2 hrs.
  • Nanofabrication laboratory – 45 min.
  • Nanocharacterization laboratory – 30 min.
  • Structural analysis laboratory – 30 min.

5. After you have completed all of the access requirements, you can start with the training for individual equipment.

2. Services for academic users

For occasional users, where training is unfeasible, full-service processing of user’s samples can be provided by CEITEC Nano staff. Full-service users do not need any training, their samples are handled by CEITEC Nano staff. They can be present at the measurement only as visitors under the supervision of authorized personnel.

How to order full-service

  1. Contact the CEITEC Nano User Office at or via phone 54114 9200 to discuss your processing requirements.
  2. The CEITEC Nano financial department will send you a quotation for CEITEC Nano services. We provide support regarding internal invoicing from projects running at CEITEC and BUT. Contact CEITEC Nano financial manager Kateřina Tydlačková (+420 54114 9205) with your questions.
  3. If you agree with the quotation send the purchase order to
  4. CEITEC Nano staff will process your samples and prepare a processing/measurement report.
  5. Upon agreement an invoice will be emailed to you together with the samples or measurement data.

Prices for academic users

Valid from 1st May 2018
Academic users using the full-service pay hourly rates (listed below - VAT is not included) for the instrument use and an additional fee for the analysis of the results (if requested).

CEITEC Nano pricelist* - full service for Academic users

Nanofabrication laboratory


RAITHE-beam writer RAITH150 Two1 500
MIRAScanning Electron Microscope/E-beam writer TESCAN MIRA31 000
DWLUV Direct Write Laser system Heidelberg Instruments DWL 66-fs1 000
SUSS-MA8Mask Aligner, NanoImprint Lithography SÜSS MicroTec MA8/BA8 Gen31 000
SUSS-WETBENCHLithographic wetbench for resist coating SÜSS MicroTec1 000
SUSS-RC8Resist coating and development system SÜSS MicroTec RCD81 000
LAURELLSpincoater Laurell WS-650-23B600
NANOCALCSpectroscopic reflectometer Ocean Optics NanoCalc 2000600
DEKTAKMechanical profilometer Bruker Dektak XT1 000
DIENERResist stripper Diener electronic NANO Plasma cleaner1 000

Depositions and etching

EVAPORATORElectron beam evaporator BESTEC1 000**
MAGNETRONMagnetron sputtering systém BESTEC1 000**
ALDAtomic layer deposition system Ultratech/CambridgeNanoTech Fiji 2001 000
XERIONRapid thermal annealing Xerion XREACT/1 250°C600
PECVD-NANOFABHigh temperature PECVD of C-based materials Oxford Instruments Plasma Technology NanoFab1 000
Experimental-PECVDPECVD with ion and mass analyzer, optical emission spectroscopy, in situ ellipsometry, langmuir probe1 000
APCVDAtmospheric Pressure chemical vapor deposition1 000
LPCVDLow pressure chemical vapor deposition1 000
MOCVDMetal organic chemical vapor deposition1 000
PECVDPECVD of Si-based materials Oxford Instruments Plasma Technology PlasmaPro 1001 000
DRIEDeep reactive ion etching of Si-based materials Oxford Instruments Plasma Technology PlasmaPro 1001 000
SCIAIon beam etching Scia Systems Coat 2001 000
RIE-CHLORINEReactive ion etching of III-V semiconductors Oxford Instruments Plasma Technology PlasmaPro 1001 000
RIE-FLUORINERIE of Si-based materials/deposition of thin films Oxford Instruments PlasmaPro NGP 801 000


WIRE-BONDERWire bonder TPT HB 16600
LASER-DICERLaser dicer Oxford Lasers A-Series600

Nanocharacterization laboratory

UHV Technologies

SIMSSecondary Ion Mass Spectroscopy ION-TOF TOF.SIMS51 500
KRATOS-XPSX-ray Photoelectron Spectroscopy Kratos Analytical Axis Supra1 500
NANOSAMnanoScanning Auger Microscopy Scienta Omicron nanoSAM Lab1 500
UHV-CLUSTERUltra High Vacuum Preparation and Analytical System - Custom Deposition Chamber SPECS1 500

Microscopy and nanomanipulation

LYRAFocused Ion Beam/Scanning Electron Microscope TESCAN LYRA31 000
ICON-SPMScanning Probe Microscope Bruker Dimension Icon1 000
KERR-MICROSCOPEMagneto-optical Kerr microscope600
NANOINDENTORHysitron TI 9501 000

Optical measurements

FTIRVacuum FTIR Vertex80v + microscope Hyperion 3000 KIT1 000
WOOLLAM-VISNIR-UV spectroscopic ellipsometer J. A. Woollam V-VASE600
WOOLLAM-MIRMIR spectroscopic ellipsometer J. A. Woollam IR-VASE1 000
VUVASVacuum ultraviolet spectrometer McPherson VUVAS 10001 000
NIRQUEST512NIR Optical Spectrometer Ocean Optics NIRQuest 512600
JAZ3UV-VIS Optical Spectrometer Ocean Optics JAZ 3-channel600
SNOM-NANONICSScanning Near-field Optical Microscopy Nanonics Imaging MV 40001 000
TERSScanning Probe Microscope + microRaman + PhotoLuminiscence system NT-MDT Ntegra Spectra + Solar II1 000

Electrical and magnetic measurements

SUMMITSemi-automated 4-probe system Cascade Microtech SUMMIT 120001 000
MPS1504-probe station Cascade Microtech MPS 150600
KEITHLEYKeithley 4200-SCS Parameter Analyzer600
LAKESHORELow Temperature Electro-Magnetic Properties Measurement System LakeShore CRX-EM-HF1 000
CRYOGENICLow Temperature Vibrating Sample Magnetometr Cryogenic Limited1 000

Structural analysis laboratory

Electron microscopy

TITANHigh resolution (scanning) Transmission Electron Microscope FEI Titan Themis 60-300 cubed2 000
HELIOSFocused Ion Beam/Scanning Electron Microscope FEI Helios NanoLab 6601 500
VERIOSHigh resolution Scanning Electron Microscope FEI Verios 460L1 500

Sample preparation

STEMIStereomicroscope Zeiss Stemi 508600
TENUPOLTEM electrolytical polisher Tenupol 5600
FISCHIONE-160TEM specimen grinding tool Fischione 160600
FISCHIONE-170Ultrasonic TEM disc cutter Fischione 170600
CITOVACVacuum impregnation chamber Citovac600
TIC3XCross section/broad beam ion polisher Leica EM TIC3X600
FISCHIONE-200Dimple grinder Fichione 200600
LECTROPOLElectrolytical polisher Lectropol 5600
TEGRAMINGrinder/polisher Tegramin 30600
ZEISS-Z1MInverted light microscope Zeiss Axio Observer Z1m600
FISCHIONE-TEM MILLIon polisher Fischione TEM Mill 1050600
LABOTOM5Metallographic saw Labotom 5600
CITOPRESSMounting press Citopress 10600
PLASMACLEANERPlasma cleaner Fischione 1020600
SAW-ACCUTOMPrecision saw Accutom 100600
LEICACOAT-NANOHigh vacuum coating system for electron microscopy Leica Microsystems EM ACE 600600

X-ray diffractometry

RIGAKU9X-ray diffractometer with high brightness source Rigaku SmartLab 9kW1 000
RIGAKU3X-ray powder diffractometer Rigaku SmartLab 3kW1 000

Micro & Nano X-ray CT laboratory

microCTmicroCT GE phoenix v|tome|x L2402 000
nanoCTnanoCT Rigaku nano3DX1 500

* Prices without VAT


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